Abstract
High-performance flexible pressure sensors have shown great potential in electronic skins, energy harvesting, soft machines, etc. However, there are still significant trade-offs in the optimization of mechanical and sensing performance, resulting in remaining challenges in terms of detection limits, sensing range, and mechanical robustness. Here, we propose a new sensor design strategy that uses a three-dimensional porous structure as an elastic matrix, while introducing anF embedded crack structure and a stiffness-regulating layer to simultaneously improve the mechanical and sensing properties of the sensor. The crack structure endows the sensor with the ability to detect small pressures and a high sensitivity, and the stiffness modulation layer provides the sensor with excellent compressibility and large deformation capabilities based on modulus modulation of the porous structure. In addition, the mechanical stability of the interface is greatly improved due to the wrapping effect of the stiffness-regulating layer on the crack structure, which effectively avoids the risk of the conductive layer slipping and delaminating. The proposed sensor enables the detection of small pressure (100 Pa), favorable sensitivity (0.2 kPa−1), wide sensing range (1 MPa), and stable sensing properties (10,000 cycles), and has also been validated for effective equipment surface and human motion monitoring, promising further expansion of the capabilities of flexible electronics in engineering applications.
Similar content being viewed by others
Data availability
The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.
References
X. Wang, L. Dong, H. Zhang, R. Yu, C. Pan, Z.L. Wang, Recent progress in electronic skin. Adv. Sci. (Weinh). 2, 1500169 (2015)
H. Yang, X. Xiao, Z. Li, K. Li, N. Cheng, S. Li, J.H. Low, L. Jing, X. Fu, S. Achavananthadith, F. Low, Q. Wang, P.L. Yeh, H. Ren, J.S. Ho, C.H. Yeow, P.Y. Chen, Wireless Ti3C2Tx MXene strain sensor with Ultrahigh Sensitivity and designated Working Windows for Soft exoskeletons. ACS Nano. 14, 11860–11875 (2020)
Z. Bai, X. Wang, M. Zheng, O. Yue, M. Huang, X. Zou, B. Cui, L. Xie, S. Dong, J. Shang, G. Gong, A.M. Blocki, J. Guo, X. Liu, Mechanically robust and transparent organohydrogel-based E‐skin nanoengineered from natural skin. Adv. Funct. Mater. 33, 2212856 (2023)
Z. Leng, P. Zhu, X. Wang, Y. Wang, P. Li, W. Huang, B. Li, R. Jin, N. Han, J. Wu, Y. Mao, Sebum-membrane‐inspired protein‐based bioprotonic hydrogel for artificial skin and human‐machine merging interface. Adv. Funct. Mater. 33, 2211056 (2023)
L. Hu, P.L. Chee, S. Sugiarto, Y. Yu, C. Shi, R. Yan, Z. Yao, X. Shi, J. Zhi, D. Kai, H.D. Yu, W. Huang, Hydrogel-based flexible electronics. Adv. Mater. 35, 2205326 (2023)
S. Bauer, S. Bauer-Gogonea, I. Graz, M. Kaltenbrunner, C. Keplinger, R. Schwodiauer, 25th anniversary article: a soft future: from robots and sensor skin to energy harvesters. Adv. Mater. 26, 149–161 (2014)
H. Lee, D. Kwon, H. Cho, I. Park, J. Kim, Soft nanocomposite based Multi-point, multi-directional strain Mapping Sensor using Anisotropic Electrical Impedance Tomography. Sci. Rep. 7, 39837 (2017)
Y. Yu, J. Li, S.A. Solomon, J. Min, All-printed soft human-machine interface for robotic physicochemical sensing. Sci. Rob. 7, eabn0495 (2022)
D. Kwon, T.I. Lee, J. Shim, S. Ryu, M.S. Kim, S. Kim, T.S. Kim, I. Park, Highly sensitive, flexible, and wearable pressure Sensor based on a giant Piezocapacitive Effect of three-Dimensional Microporous Elastomeric Dielectric Layer. ACS Appl. Mater. Interfaces. 8, 16922–16931 (2016)
C.M. Boutry, A. Nguyen, Q.O. Lawal, A. Chortos, S. Rondeau-Gagne, Z. Bao, A sensitive and biodegradable pressure sensor array for Cardiovascular Monitoring. Adv. Mater. 27, 6954–6961 (2015)
Y. Zang, F. Zhang, C.-. Di, D. Zhu, Advances of flexible pressure sensors toward artificial intelligence and health care applications. Mater. Horiz. 2, 140–156 (2015)
W. Heng, S. Solomon, W. Gao, Flexible electronics and devices as Human-Machine interfaces for Medical Robotics. Adv. Mater. 34, e2107902 (2022)
Y. Yang, H. Zhang, Z.-H. Lin, Y.S. Zhou, Q. Jing, Y. Su, Human skin based Triboelectric Nanogenerators for Harvesting Biomechanical Energy and as SelfPowered active tactile Sensor System. ACS Nano. 7, 9213–9222 (2013)
S. Wang, L. Lin, Z.L. Wang, Triboelectric nanogenerators as self-powered active sensors. Nano Energy. 11, 436–462 (2015)
G. Zhu, W.Q. Yang, T. Zhang, Q. Jing, J. Chen, Y.S. Zhou, P. Bai, Z.L. Wang, Self-powered, ultrasensitive, flexible tactile sensors based on contact electrification. Nano Lett. 14, 3208–3213 (2014)
D.J. Lipomi, M. Vosgueritchian, B.C. Tee, S.L. Hellstrom, J.A. Lee, C.H. Fox, Z. Bao, Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. Nat. Nanotechnol. 6, 788–792 (2011)
S. Takamatsu, T. Yamashita, T. Imai, T. Itoh, Lightweight flexible keyboard with a conductive polymer-based touch sensor fabric. Sens. Actuators A: Phys. 220, 153–158 (2014)
B. Nie, X. Li, J. Shao, X. Li, H. Tian, D. Wang, Q. Zhang, B. Lu, Flexible and transparent strain sensors with embedded Multiwalled Carbon nanotubes Meshes. ACS Appl. Mater. Interfaces. 9, 40681–40689 (2017)
J.T. Muth, D.M. Vogt, R.L. Truby, Y. Menguc, D.B. Kolesky, R.J. Wood, J.A. Lewis, Embedded 3D printing of strain sensors within highly stretchable elastomers. Adv. Mater. 26, 6307–6312 (2014)
T.S. Natarajan, S.B. Eshwaran, K.W. Stockelhuber, S. Wiessner, P. Potschke, G. Heinrich, A. Das, Strong strain sensing performance of Natural Rubber nanocomposites. ACS Appl. Mater. Interfaces. 9, 4860–4872 (2017)
H. Aguilar-Bolados, M. Yazdani-Pedram, A. Contreras-Cid, M.A. López-Manchado, A. May-Pat, F. Avilés, Influence of the morphology of carbon nanostructures on the piezoresistivity of hybrid natural rubber nanocomposites. Compos. Part B: Eng. 109, 147–154 (2017)
Y. Zheng, Y. Li, K. Dai, Y. Wang, G. Zheng, C. Liu, C. Shen, A highly stretchable and stable strain sensor based on hybrid carbon nanofillers/polydimethylsiloxane conductive composites for large human motions monitoring. Compos. Sci. Technol. 156, 276–286 (2018)
Y. Zheng, Y. Li, Z. Li, Y. Wang, K. Dai, G. Zheng, C. Liu, C. Shen, The effect of filler dimensionality on the electromechanical performance of polydimethylsiloxane based conductive nanocomposites for flexible strain sensors. Compos. Sci. Technol. 139, 64–73 (2017)
G. Canavese, S. Stassi, C. Fallauto, S. Corbellini, V. Cauda, V. Camarchia, M. Pirola, C.F. Pirri, Piezoresistive flexible composite for robotic tactile applications. Sens. Actuators A: Phys. 208, 1–9 (2014)
J.C. Yang, J.O. Kim, J. Oh, S.Y. Kwon, J.Y. Sim, D.W. Kim, H.B. Choi, S. Park, Microstructured Porous pyramid-based Ultrahigh sensitive pressure sensor insensitive to strain and temperature. ACS Appl. Mater. Interfaces. 11, 19472–19480 (2019)
B. Zhu, Y. Ling, L.W. Yap, M. Yang, F. Lin, S. Gong, Y. Wang, T. An, Y. Zhao, W. Cheng, Hierarchically structured Vertical Gold Nanowire array-based wearable pressure sensors for Wireless Health Monitoring. ACS Appl. Mater. Interfaces. 11, 29014–29021 (2019)
C. Ma, D. Xu, Y.C. Huang, P. Wang, J. Huang, J. Zhou, W. Liu, S.T. Li, Y. Huang, X. Duan, Robust flexible pressure sensors made from Conductive micropyramids for Manipulation tasks. ACS Nano. 14, 12866–12876 (2020)
Y. Jeong, J. Park, J. Lee, K. Kim, I. Park, Ultrathin, biocompatible, and flexible pressure sensor with a wide pressure range and its Biomedical Application. ACS Sens. 5, 481–489 (2020)
G.J. Zhu, P.G. Ren, J. Wang, Q. Duan, F. Ren, W.M. Xia, D.X. Yan, A highly sensitive and broad-range pressure Sensor based on polyurethane mesodome arrays embedded with silver nanowires. ACS Appl. Mater. Interfaces. 12, 19988–19999 (2020)
N. Bai, L. Wang, Y. Xue, Y. Wang, X. Hou, G. Li, Y. Zhang, M. Cai, L. Zhao, F. Guan, X. Wei, C.F. Guo, Graded interlocks for Iontronic Pressure Sensors with high sensitivity and high linearity over a broad range. ACS Nano. 16, 4338–4347 (2022)
Z.J. Zhao, S. Hwang, M. Bok, H. Kang, S. Jeon, S.H. Park, J.H. Jeong, Nanopattern-embedded Micropillar structures for Security Identification. ACS Appl. Mater. Interfaces. 11, 30401–30410 (2019)
Y. Mao, B. Ji, G. Chen, C. Hao, B. Zhou, Y. Tian, Robust and wearable pressure Sensor assembled from AgNW-Coated PDMS Micropillar sheets with high sensitivity and wide detection range. ACS Appl. Nano Mater. 2, 3196–3205 (2019)
L. Cheng, W. Qian, L. Wei, H. Zhang, T. Zhao, M. Li, A. Liu, H. Wu, A highly sensitive piezoresistive sensor with interlocked graphene microarrays for meticulous monitoring of human motions. J. Mater. Chem. C 8, 11525–11531 (2020)
X. Tang, W. Yang, S. Yin, G. Tai, M. Su, J. Yang, H. Shi, D. Wei, J. Yang, Controllable graphene wrinkle for a high-performance flexible pressure Sensor. ACS Appl. Mater. Interfaces. 13, 20448–20458 (2021)
J. Yan, Y. Ma, X. Li, C. Zhang, M. Cao, W. Chen, S. Luo, M. Zhu, Y. Gao, Flexible and high-sensitivity piezoresistive sensor based on MXene composite with wrinkle structure. Ceram. Int. 46, 23592–23598 (2020)
Y.-W. Cai, X.-N. Zhang, G.-G. Wang, G.-Z. Li, D.-Q. Zhao, N. Sun, F. Li, H.-Y. Zhang, J.-C. Han, Y. Yang, A flexible ultra-sensitive triboelectric tactile sensor of wrinkled PDMS/MXene composite films for E-skin. Nano Energy 81, 105663 (2021)
J. Zhang, L.J. Zhou, H.M. Zhang, Z.X. Zhao, S.L. Dong, S. Wei, J. Zhao, Z.L. Wang, B. Guo, P.A. Hu, Highly sensitive flexible three-axis tactile sensors based on the interface contact resistance of microstructured graphene. Nanoscale. 10, 7387–7395 (2018)
G.Y. Bae, S.W. Pak, D. Kim, G. Lee, H. Kim do, Y. Chung, K. Cho, Linearly and highly pressure-sensitive electronic skin based on a Bioinspired hierarchical structural array. Adv. Mater. 28, 5300–5306 (2016)
Z. Yu, G. Cai, X. Liu, D. Tang, Platinum nanozyme-triggered pressure-based Immunoassay using a three-Dimensional Polypyrrole Foam-based flexible pressure Sensor. ACS Appl. Mater. Interfaces. 12, 40133–40140 (2020)
X. Wu, Y. Han, X. Zhang, Z. Zhou, C. Lu, L.-A. Compliant, Low-Cost, and versatile pressure-sensing platform based on microcrack-designed Carbon Black@Polyurethane sponge for human-machine interfacing. Adv. Funct. Mater. 26, 6246–6256 (2016)
X. Lei, L. Ma, Y. Li, Y. Cheng, G.J. Cheng, F. Liu, Highly sensitive and wide-range flexible pressure sensor based on carbon nanotubes-coated polydimethylsiloxane foam. Mater. Lett. 308, 131151 (2022)
Y. Xiong, Y. Zhu, X. Liu, P. Zhu, Y. Hu, R. Sun, C.-P. Wong, A flexible pressure sensor based on melamine foam capped by copper nanowires and reduced graphene oxide. Mater. Today Commun. 24, 100970 (2020)
Y. Ding, T. Xu, O. Onyilagha, H. Fong, Z. Zhu, Recent advances in flexible and wearable pressure sensors based on piezoresistive 3D monolithic conductive sponges. ACS Appl. Mater. Interfaces. 11, 6685–6704 (2019)
J. Zhai, Y. Zhang, C. Cui, A. Li, W. Wang, R. Guo, W. Qin, E. Ren, H. Xiao, M. Zhou, Flexible Waterborne Polyurethane/Cellulose Nanocrystal Composite aerogels by integrating Graphene and Carbon Nanotubes for a highly sensitive pressure Sensor. ACS Sustain. Chem. Eng. 9, 14029–14039 (2021)
L. Bi, Z. Yang, L. Chen, Z. Wu, C. Ye, Compressible AgNWs/Ti3C2Tx MXene aerogel-based highly sensitive piezoresistive pressure sensor as versatile electronic skins. J. Mater. Chem. A 8, 20030–20036 (2020)
S. Pyo, J. Lee, W. Kim, E. Jo, J. Kim, Multi-Layered, Hierarchical Fabric‐Based Tactile Sensors with High Sensitivity and Linearity in Ultrawide Pressure Range. Adv. Funct. Mater. 29, 1902484 (2019)
L. Huang, R. Zeng, D. Tang, X. Cao, Bioinspired and multiscale hierarchical design of a pressure sensor with high sensitivity and wide linearity range for high-throughput biodetection. Nano Energy 99, 107376 (2022)
Funding
The authors gratefully acknowledge the support of the Natural Science Research Project of Shaanxi Provincial Department of Education (No.22JK0453).
Author information
Authors and Affiliations
Contributions
Material preparation, data collection, and analysis were performed by YL, TL, and YQ. The first draft of the manuscript was written by YL and XW. Project administration, conceptualization, and formal analysis were performed by YL, TL, and XW. Visualization, Investigation, and Methodology were performed by YL and YQ. All authors read and approved the final manuscript.
Corresponding author
Ethics declarations
Conflict of interest
The authors have no relevant financial or non-financial interests to disclose.
Additional information
Publisher’s Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Supplementary Information
Below is the link to the electronic supplementary material.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Lu, Y., Lei, T., Qin, Y. et al. A flexible pressure sensor based on embedded cracks and stiffness-regulating layer with high detection limits and wide test ranges. J Mater Sci: Mater Electron 35, 110 (2024). https://doi.org/10.1007/s10854-023-11835-3
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s10854-023-11835-3