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The effect of bottom electrode on structure and electrical properties of BaZr0.15Ti0.85O3 films on SrTiO3 substrates

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Abstract

SrRuO3 (SRO), LaNiO3 (LNO), and Pt layers were supported on (001) SrTiO3 (STO) substrate, respectively, as bottom electrode for BaZr0.15Ti0.85O3 (BZT) films by radio-frequency magnetron sputtering method. The similar lattice match between the oxide electrodes and the substrates facilitated the oriented growth of the SRO and LNO layers, thus, promoting the (00 L) oriented growth of BZT film. The Pt layer was textured, and its crystalline orientation was highly dependent on the increase of temperature, which significantly affected the structure and electrical properties of BZT films. BZT films deposited on SRO, LNO, and Pt layers with different crystalline orientations were comparatively investigated. BZT/Pt/STO heterostructure exhibited higher dielectric constant and superior energy storage destiny than the other two samples. While BZT film on Pt(500 °C)/STO showed larger energy storage destiny and on Pt(800 °C)/STO shows higher energy storage efficiency up to 95.5%. The differences of electrical properties were mainly attributed to the crystal structure and grain size of BZT films.

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Funding

This work was supported by the National Natural Science Foundation of China (NSFC) (Grant Nos. 61574080 and 51602160) and Natural Science Foundation of Jiangsu Province (Grant Nos. BK2012829 and BK20150842).

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Authors and Affiliations

  1. College of Electronic and Optical Engineering & College of Flexible Electronics (future Technology), Nanjing University of Posts and Telecommunications, 210023, Nanjing, China

    Yansong Li, Xiaoying Fang, Fangren Hu & Wei Zhang

  2. Peter Grunberg Research Center, Nanjing University of Posts and Telecommunications, 210003, Nanjing, China

    Fangren Hu

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  1. Yansong Li
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  2. Xiaoying Fang
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  3. Fangren Hu
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  4. Wei Zhang
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Contributions

YL: Implemented the research scheme and wrote the manuscript. XF: Data collecting. FH: reviewed and supervised. WZ: Reviewed and supervised.

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Correspondence to Fangren Hu or Wei Zhang.

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Li, Y., Fang, X., Hu, F. et al. The effect of bottom electrode on structure and electrical properties of BaZr0.15Ti0.85O3 films on SrTiO3 substrates. J Mater Sci: Mater Electron 34, 746 (2023). https://doi.org/10.1007/s10854-023-10102-9

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  • DOI: https://doi.org/10.1007/s10854-023-10102-9

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