Abstract
An immense number of sensors has been reported in the literature employing various methods for the detection of different gases and vapors. This article summarizes those sensors whose sensing layer is made up of nanostructured materials and a change in capacitance value of device is the key parameter for detecting a gas or vapor. Now-a-days, capacitive sensors are emerging as they consume less power, operate well at room temperature and show decent response and recovery time. The sensing principles, configurations, mechanisms and performances of capacitive sensors based on different nanostructures are summarized and discussed in the current article. Emerging carbon based nanomaterials like carbon nanotube and graphene are also highlighted for capacitive mode detection of gases and vapors. Finally, an outlook of primary challenges in this field are identified and discussed at the end of the review.
Similar content being viewed by others
References
R. Li, S. Chen, Z. Lou, L. Li, T. Huang, Y. Song, D. Chen, G. Shen, Fabrication of porous SnO2 nanowires gas sensors with enhanced sensitivity. Sens. Actuators B 252, 79–85 (2017)
A. Hazra, S.K. Hazra, E. Bontempi, V.N. Lakshmi, S. Sinha, C.K. Sarkar, S. Basu, Anodically grown nanocrystalline titania thin film for hydrogen gas sensors—a comparative study of planar and MAIM device configurations. Sens. Actuators B 188, 787–796 (2013)
M.N. Kavalenka, C.C. Striemer, J.S. DesOrmeaux, J.L. McGrath, P.M. Fauchet, Chemical capacitive sensing using ultrathin flexible nanoporous electrodes. Sens. Actuators B 162, 22–26 (2012)
S.V. Patel, T.E. Mlsna, B. Fruhberger, E. Klaassen, S. Cemalovic, D.R. Baselt, Chemicapacitive microsensors for volatile organic compound detection. Sens. Actuators B 96, 541 (2003)
S. Satyanarayana, D.T. McCormick, A. Majumdar, Parylene micro membrane capacitive sensor array for chemical and biological sensing. Sens. Actuators B 115, 494 (2006)
J.D. Adams, G. Parrott, C. Bauer, T. Sant, L. Manning, M. Jones, B. Rogers, D. McCorkle, T.L. Ferrell, Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array. Appl. Phys. Lett. 83, 3428 (2003)
K.K. Park, H.J. Lee, G.G. Yaralioglu, A.S. Ergun, O. Oralkan, M. Kupnik, C.F. Quate, B.T. Khuri-Yakub, T. Braun, J.-P. Ramseyer, H.P. Lang, M. Hegner, C. Gerber, J.K. Gimzewski, Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen. Appl. Phys. Lett. 91, 094102 (2007)
H. Taghinejad, M. Taghinejad, M. Abdolahad, A. Saeidi, S. Mohajerzadeh, Fabrication and modeling of high sensitivity humidity sensors based on doped silicon nanowires. Sens. Actuators B 176, 413–419 (2013)
A.M. Kummer, A. Hierlemann, H. Baltes, Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. Anal. Chem. 76, 2470 (2004)
R. Igreja, C.J. Dias, Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structure. Sens. Actuators A 112, 291–301 (2004)
M. Babaei, N. Alizadeh, Methanol selective gas sensor based on nano-structured conducting polypyrrole prepared by electrochemically on interdigital electrodes for biodiesel analysis. Sens. Actuators B 183, 617–626 (2013)
Y. Chen, F. Meng, M. Li, J. Liu, Novel capacitive sensor: Fabrication from carbon nanotube arrays and sensing property characterization. Sens. Actuators B 140, 396–401 (2009)
J.A. Robinson, E.S. Snow, F.K. Perkins, Improved chemical detection using single walled carbon nanotube network capacitors. Sens. Actuators A 135, 309–314 (2007)
N.L. Teradal, S. Marx, A. Moraga, R. Jelinek, Porous graphene oxide chemi-capacitor vapor sensor array. J. Mater. Chem. C 5, 1128–1135 (2017)
N.M. Kiasari, S. Soltanian, B. Gholamkhass, P. Servati, Room temperature ultra-sensitive resistive humidity sensor based on single zinc oxide nanowire. Sens. Actuators A 182, 101–105 (2012)
D. Jung, M. Han, G.S. Lee, Humidity-sensing characteristics of multi-walled carbon nanotube sheet. Mater. Lett. 122, 281–284 (2014)
Y. Wu, T. Zhang, Y. Rao, Y. Gong, Miniature interferometric humidity sensors based on silica/polymer microfiber knot resonators. Sens. Actuators B 155, 258–263 (2011)
Y. Li, M.J. Yang, Y. She, Humidity sensors using in situ synthesized sodiumpolystyrenesulfonate/ZnO nanocomposites. Talanta 62, 707–712 (2004)
I. Venditti, I. Fratoddi, A. Bearzotti, Self-assembled copolymeric nanoparticles as chemically interactive materials for humidity sensors. Nanotechnology 21, 355502 (2010)
Y. Shen, W. Wang, A. Fan, D. Wei, W. Liu, C. Han, Y. Shen, D. Meng, X. San, Highly sensitive hydrogen sensors based on SnO2 nanomaterials with different morphologies. Int. J. Hydrogen Energy 40(45), 15773–15779 (2015)
F. Yavari, N. Koratkar, G.-B.C. Sensors, J. Phys. Chem. Lett. 3(13), 1746–1753 (2012)
M.A. Ponce, R. Parra, R. Savu, E. Joanni, P.R. Bueno, M. Cilense, J.A. Varela, M.S. Castro, Impedance spectroscopy analysis of TiO2 thin film gas sensors obtained from water-based anatase colloids. Sens. Actuators B 139, 447–452 (2009)
A. Hazra, K. Dutta, B. Bhowmik, P.P. Chattopadhyay, P. Bhattacharyya, Room temperature alcohol sensing by oxygen vacancy controlled TiO2 nanotube array. Appl. Phys. Lett. 105, 081604 (2014)
A. Hazra, S. Das, J. Kanungo, C.K. Sarkar, S. Basu, Studies on a resistive gas sensor based on sol–gel grown nanocrystalline p-TiO2 thin film for fast hydrogen detection. Sens. Actuators B 183, 87–95 (2013)
X. Chen, C.K.Y. Wong, C.A. Yuan, G. Zhang, Nanowire-based gas sensors. Sens. Actuators B. 177, 178–195 (2013)
S. Tian, F. Yang, D. Zeng, C. Xie, Solution-processed gas sensors based on ZnO nanorods array with an exposed (0001) facet for enhanced gas-sensing properties. J. Phys. Chem. 116, 10586–10591 (2012)
Y.M. Wong, W.P. Kang, J.L. Davidson, A. Wisitsora-at, K.L. Soh, A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection. Sens. Actuators B 93, 327–332 (2003)
A. Hazra, P. Bhattacharyya, Tailoring of the gas sensing performance of TiO2 nanotubes by 1-D vertical electron transport technique. IEEE Trans. Electron Devices 61, 3483–3489 (2014)
K. Skucha, Z. Fan, K. Jeon, A. Javey, B. Boser, Palladium/silicon nanowire Schottky barrier-based hydrogen sensors. Sens. Actuators B 145, 232–238 (2010)
L.Y. Li, Y.F. Dong, W.F. Jiang, H.F. Ji, X.J. Li, High-performance capacitive humidity sensor based on silicon nanoporous pillar array. Thin Solid Films. 517, 948–951 (2008)
S. Homayoonnia, S. Zeinali, Design and fabrication of capacitive nanosensor based on MOF nanoparticles as sensing layer for VOCs detection. Sens. Actuators B 237, 776–786 (2016)
L. Liu, C. Guo, S. Li, L. Wang, Q. Dong, W. Li, Improved H2 sensing properties of Co-doped SnO2 nanofibers. Sens. Actuators B 150, 806–810 (2010)
M.T. Soo, K.Y. Cheong, A.F.M. Noor, Advances of SiC-based MOS capacitor hydrogen sensors for harsh environment applications. Sens. Actuators B 151, 39–55 (2010)
J. Kong, N.R. Franklin, C.W. Zhou, M.G. Chapline, S. Peng, K. Cho, H.J. Dai, Nanotube molecular wires as chemical sensors. Science 287, 622–625 (2000)
T. Someya, J. Small, P. Kim, C. Nuckolls, J.T. Yardley, Alcohol vapor sensors based on single-walled carbon nanotube field effect transistors. Nano Lett. 3, 877–888 (2003)
P.G. Collins, K. Bradley, M. Ishigami, A. Zettl, Extreme oxygen sensitivity of electronic properties of carbon nanotubes. Science 287, 1801–1804 (2000)
T. Zhang, S. Mubeen, N.V. Myung, M.A. Deshusses, Recent progress in carbon nanotube-based gas sensors. Nanotechnology. 19, 332001 (2008)
J. Yua, H. Wen, M. Shafiei, M.R. Field, Z.F. Liu, W. Wlodarski, N. Motta, Y.X. Li, K. Kalantar-zadeh, P.T. Lai, A hydrogen/methane sensor based on niobium tungsten oxide nanorods synthesized by hydrothermal method. Sens. Actuators B 184, 118–129 (2013)
A. Modi, N. Koratkar, E. Lass, B.Q. Wei, P.M. Ajayan, Miniaturized gas ionization sensors using carbon nanotubes. Nature 424, 171–174 (2003)
E.S. Snow, F.K. Perkins, Capacitance and conductance of single-walled carbon nanotubes in the presence of chemical vapors. Nano Lett. 5, 2414–2417 (2005)
K. Lui, M. Vest, P. Berlowitz, S. Akhter, H.H. Kung, Desorption of Zn from ZnO single-crystal surfaces during temperature programmed decomposition of methanol, formic acid, and 2-propanol. J. Phys. Chem. 90, 3183–3187 (1986)
P.G. Smith, Introduction to Food Process Engineering, (Springer, New York, 2011), 28–34
J.M. Castillo, Relative humidity: sensors, management and environmental effects. Nova Sci. Publishers 1–5 (2011)
C.L. Zhao, M. Qin, W.H. Li, Q.A. Huang, Enhanced Performance of a CMOS Interdigital Capacitive Humidity Sensor by Graphene Oxide, 16th International Solid-State Sensors (Actuators and Microsystems Conference, Beijing, 2011), pp. 1954–1957
M. Rahimabady, C.Y. Tan, S.Y. Tan, S. Chen, L. Zhang, Y.F. Chen, K. Yao, K. Zang, A. Humbert, D. Soccol, M. Bolt, Dielectric nanocomposite of diphenylethylenediamine and P-type multi-walled carbon nanotube for capacitive carbon dioxide sensors. Sens. Actuators B 243, 596–601 (2017)
T. Ishihara, S. Matsubara, Capacitive type gas sensors. J. Electroceram. 2, 215–228 (1998)
M.S. Hosseini, S. Zeinali, M.H. Sheikhi, Fabrication of capacitive sensor based on Cu-BTC (MOF-199) nanoporous film for detection of ethanol and methanol vapors. Sens. Actuators B 230, 9–16 (2016)
J.T.W. Yeow, J.P.M. She, Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor. Nanotechnology. 17, 5441–5448 (2006)
E.S. Snow, F.K. Perkins, E.J. Houser, S.C. Badescu, T.L. Reinecke, Chemical detection with a single-walled carbon nanotube capacitor. Science. 307, 1942–1945 (2005)
X.J. Li, S.J. Chen, C.Y. Feng, Characterization of silicon nanoporous pillar array as room-temperature capacitive ethanol gas sensor. Sens. Actuators B 123, 461–465 (2007)
C. Lu, Z. Chen, K. Saito, Hydrogen sensors based on Ni/SiO2/Si MOS capacitors. Sens. Actuators B 122, 556–559 (2007)
M. Armgarth, D. Söderberg, I. Lundström, Palladium and platinum gate metal oxide semiconductor capacitors in hydrogen and oxygen mixtures. Appl. Phys. Lett. 41, 654–655 (1982)
C. Lu, Z. Chen, MOS hydrogen sensor with very fast response based on ultra-thin thermal SiO2 film. Int. J. Hydrogen Energy. 35, 12561–12567 (2010)
A. Labidi, C. Jacolin, M. Bendahan, A. Abdelghani, J. Guérin, K. Aguir, M. Maaref, Impedance spectroscopy on WO3 gas sensor. Sens. Actuators B 106, 713–718 (2005)
B.G. Streetman, S. Banerjee, Solid State Electronic Devices, PHI, Fifth Edition, 2000
L.F. Aval, S.M. Elahi, E. Darabi, S.A. Sebt, Comparison of the MOS capacitor hydrogen sensors with different SiO2 film thicknesses and a Ni-gate film in a 4% hydrogen–nitrogen mixture. Sens. Actuators B 216, 367–373 (2015)
J. Lin, E. Obermeier, Capacitive thin film gas sensor with signal processing system for determination of SO2. Sens. Actuators B 16, 319–322 (1993)
P.M. Faia, E.L. Jesus, C.S. Louro, TiO2:WO3 composite humidity sensors doped with ZnO and CuO investigated by impedance spectroscopy. Sens. Actuators B 203, 340–348 (2014)
L.L. Wang, H.Y. Wang, W.C. Wang, K. Li, X.C. Wang, X.J. Li, Capacitive humidity sensing properties of ZnO cauliflowers grown on silicon nanoporous pillar array. Sens. Actuators B 177, 740–744 (2013)
M. Kaur, S.K. Gupta, C.A. Betty, V. Saxena, V.R. Katti, S.C. Gadkari, J.V. Yakhmi, Detection of reducing gases by SnO2 thin films: an impedance spectroscopy study. Sens. Actuators B 107, 360–365 (2005)
J. Wang, M. Su, J. Qi, L. Chang, Sensitivity and complex impedance of nanometer zirconia thick film humidity sensors. Sens. Actuators B 139, 418–424 (2009)
Y. Li, W.F. Jiang, S.H. Xiao, Y.F. Dong, H.F. Ji, X.J.Li, Effect of electrode configuration on capacitive humidity sensitivity of silicon nanoporous pillar array. Physica E 41, 621–625 (2009)
W.F. Jiang, S.H. Xiao, C.Y. Feng, H.Y. Li, X.J. Li, Resistive humidity sensitivity of arrayed multi-wall carbon nanotube nests grown on arrayed nanoporous silicon pillars. Sens. Actuators B 125, 651–655 (2007)
W. Li, E. Dai, G. Bai, J. Xu, Depth-dependent humidity sensing properties of silicon nanopillar array. Sens. Actuators B 237, 526–533 (2016)
L.L. Wang, L.P. Kang, H.Y. Wang, Z.P. Chen, Xin Jian Li, Capacitive humidity sensitivity of SnO2:Sn thin film grown on silicon nanoporous pillar array. Sens. Actuators B 229, 513–519 (2016)
H.J. Xu, X.J. Li, Silicon nanoporous pillar array: a silicon hierarchical structure with high light absorption and triple-band photoluminescence. Opt. Express. 16, 2933–2941 (2008)
Z. Wang, C. Song, H. Yin, J. Zhang, Capacitive humidity sensors based on zinc oxide nanorods grown on silicon nanowires arrays at room temperature. Sens. Actuators A 235, 234–239 (2015)
H.Y. Wang, Y.Q. Wang, Q.F. Hu, X.J. Li, Capacitive humidity sensing properties of SiC nanowires grown on silicon nanoporous pillar array., Sens. Actuators B 166–167, 451–456 (2012)
A. Salomonsson, S. Roy, C. Aulin, J. Cerdà, P.O. Käll, L. Ojamäe, M. Strand, M. Sanati, A.L. Spetz, Nanoparticles for long-term stable, more selective MISiCFET gas sensors. Sens. Actuators B 107, 831–838 (2005)
R. Loloee, B. Chorpening, S. Beer, R.N. Ghosh, Hydrogen monitoring for power plant applications using SiC sensors. Sens. Actuators B 129, 200–210 (2008)
F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, M. Eickhoff, A highly stable SiC based microhotplate NO2 gas-sensor. Sens. Actuators B 78, 216–220 (2001)
N.G. Wright, A.B. Horsfall, SiC sensors: a review. J. Phys. D: Appl. Phys. 40, 6345–6354 (2007)
Y. Qiu, S. Yang, ZnO nanotetrapods: controlled vapor-phase synthesis and application for humidity sensing. Adv. Func. Mater. 17, 1345–1352 (2007)
X. Hu, J. Gong, L. Zhang, J.C. Yu, Continuous size tuning of monodisperse ZnO colloidal nanocrystal clusters by a microwave-polyol process and their application for humidity sensing. Adv. Mater. 20, 4845–4850 (2008)
Q. Qi, T. Zhang, Q.J. Yu, R. Wang, Y. Zeng, L. Liu, H.B. Yang, Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing. Sens. Actuators B 133, 638–643 (2008)
B. Tao, J. Zhang, F. Miao, H. Li, L. Wan, Y. Wang, Capacitive humidity sensors based on Ni/SiNWs nanocomposites. Sens. Actuators B 136, 144–150 (2009)
H.T. Hsueh, T.J. Hsueh, S.J. Chang, F.Y. Hung, W.Y. Weng, C.L. Hsu, B.T. Dai, Si nanowire-based humidity sensors prepared on glass substrate. IEEE Sens. J. 11, 3036–3041 (2011)
X. Chen, J. Zhang, Z. Wang, Q. Yan, S. Hui, Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification. Sens. Actuators B 156, 631–636 (2011)
K. Narimani, F.D. Nayeri, M. Kolahdouz, P. Ebrahimi, Fabrication, modeling and simulation of high sensitivity capacitive humidity sensors based on ZnO nanorods. Sens. Actuators B 224, 338–343 (2016)
Y. Lee, C. Huang, H. Chen, H. Yang, Low temperature solution-processed ZnO nanorod arrays with application to liquid ethanol sensors. Sens. Actuators B 189, 307–312 (2013)
X. Zhou, J. Li, M. Ma, Q. Xue, Effect of ethanol gas on the electrical properties of ZnO nanorods. Physica E. 43, 1056–1060 (2011)
X. Song, Q.Q.T. Zhang, C. Wang, A humidity sensor based on KCl-doped SnO2 nanofibers. Sens. Actuators B 138, 368–373 (2009)
K. Dutta, A. Hazra, P. Bhattacharyya, Ti/TiO2 nanotube array/Ti capacitive device for non-polar aromatic hydrocarbon detection. IEEE Trans. Device Mater. Reliab. 16, 235–242 (2016)
T. Terencio, F. Di Renzo, D. Berthomieu, P. Trens, Adsorption of acetone vapor by Cu-BTC: an experimental and computational study. J. Phys. Chem. C. 117, 26156–26165 (2013)
P. Davydovskaya, A. Ranft, B.V. Lotsch, R. Pohle, Analyte detection with Cu-BTC metal–organic framework thin films by means of mass-sensitive and work-function-based readout. Anal. Chem. 86, 6948–6958 (2014)
Z. Wang, L. Shi, F. Wu, S. Yuan, Y. Zhao, M. Zhang, The sol-gel template synthesis of porous TiO2 for a high performance humidity sensor. Nanotechnology 22, 275502–275510 (2011)
D. Li, Y.N. Xia, Fabrication of titania nanofibers by electrospinning. Nano Lett. 3, 555–560 (2003)
Y. Zhang, H. Li, L. Pan, T. Lu, Z. Sun, Capacitive behavior of graphene–ZnO composite film for supercapacitors. J. Electroanal. Chem. 634, 68–71 (2009)
S. Dhall, N. Jaggi, R. Nathawat, Functionalized multiwalled carbon nanotubes based hydrogen gas sensor. Sens. Actuators A 201, 321–327 (2013)
J. Suehiro, H. Imakiire, S. Hidaka, W. Ding, G. Zhou, K. Imasaka, M. Hara, Schottky-type response of carbon nanotube NO2 gas sensor fabricated onto aluminum electrodes by dielectrophoresis. Sens. Actuators B 114, 943–949 (2006)
S.G. Wang, Q. Zhang, D.J. Yang, P.J. Sellin, G.F. Zhong, Multi-walled carbon nanotube-based gas sensors for NH3 detection. Diam. Relat. Mater. 13, 1327–1332 (2004)
S. Basu, P. Bhattacharyya, Recent developments on graphene and graphene oxide based solid state gas sensors. Sens. Actuators B 173, 1–21 (2012)
A. Ghosh, D. Late, L.S. Panchakarla, A. Govindaraj, C.N.R. Rao, NO2 and humidity sensing characteristics of few-layer graphenes. J. Exp. Nanosci. 4, 313–322 (2009)
R. Saito, M. Fujita, G. Dresselhaus, M.S. Dresselhaus, Electronic structure of chiral graphene tubules. Appl. Phys. Lett. 60, 2204–2206 (1992)
M.T. Ahmadi, R. Ismail, S. Anwar, Handbook of Research on Nanoelectronic Sensor Modeling and Applications, IGI Global 2016
H. Bi, K. Yin, X. Xie, J. Ji, S. Wan, L. Sun, M. Terrones, M.S. Dresselhaus, Ultrahigh humidity sensitivity of graphene oxide. Sci. Rep. 3, 2714 (2013)
S. Borini, R. White, D. Wei, M. Astley, S. Haque, E. Spigone, N. Harris, J. Kivioja, T. Ryhanen, Ultrafast Graphene Oxide Humidity Sensors. ACS Nano 7, 11166–11173 (2013)
S. Chopra, K. McGuire, N. Gothard, A.M. Rao, A. Pham, Selective gas detection using a carbon nanotube sensor. Appl. Phys. Lett. 83, 2280–2282 (2003)
V. Vizcaino, M. Jelisavcic, J.P. Sullivan, S.J. Buckman, Elastic electron scattering from formic acid (HCOOH): absolute differential cross-sections. New J. Phys. 8, 85–93 (2006)
S. Brunauer, L.S. Deming, W.E. Deming, E. Teller, On a theory of the van der Waals adsorption of gases. J. Am. Chem. Soc. 62, 1723–1732 (1940)
Y. Wang, S. Park, J.T.W. Yeow, A. Langner, F. Müller, A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating. Sens. Actuators B 149, 136–142 (2010)
M. Agarwal, M.D. Balachandran, S. Shrestha, K. Varahramyan, SnO2 nanoparticle-based passive capacitive sensor for ethylene detection. J. Nanomater. 2012, 145406–145410 (2012)
F. Miao, B. Tao, L. Sun, T. Liu, J. You, L. Wang, P.K. Chu, Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites. Sens. Actuators A 160, 48–53 (2010)
H. Chen, Q. Xue, M. Ma, X. Zhou, Capacitive humidity sensor based on amorphous carbon film/Si heterojunctions. Sens. Actuators B 150, 487–489 (2010)
L. Chen, J. Zhang, Capacitive humidity sensors based on the dielectrophoretically manipulated ZnO nanorods. Sens. Actuators A 178, 88–93 (2012)
Acknowledgements
This work was supported in part by Early Carrier Research Grant (Lett. No. ECR/2015/000345) by SERB, Govt. of India.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bindra, P., Hazra, A. Capacitive gas and vapor sensors using nanomaterials. J Mater Sci: Mater Electron 29, 6129–6148 (2018). https://doi.org/10.1007/s10854-018-8606-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-018-8606-2