Abstract
This work investigated the effect of interfacial dissolution on electromigration failures at metal micro-joint Interface. A theoretical model is first developed to define the critical temperature, which determines the EM-induced failure (either voiding or dissolution) at the metal micro-joint interface. Using the present developed theoretical model, a critical temperature (75.19 °C) is calculated out and explains the failure modes well at the Sn/Cu micro-joint interfaces observed in the present works. EM-induced Cu consumption is the EM failure mode at the test temperature over 75.19 °C (155, 180, and 200 °C) and (2) EM-induced voids is the EM failure mode at the test temperature below 75.19 °C (40 °C).
Similar content being viewed by others
References
K.N. Chen, K.N. Tu MRS Bull. 40.03, 219 (2015)
S.S. Iyer, MRS Bull. 40.03, 225 (2015)
C.K. Hu, R. Rosenberg, K.Y. Lee, Appl. Phys. Lett. 74, 2945 (1999)
J.W. Nah, J.O. Suh, K.N. Tu, S.W. Yoon, V.S. Rao, V. Kripesh, F. Hua, J. Appl. Phys. 100, 123513 (2006)
E.C. Yeh, W.J. Choi, K.N. Tu, P. Elenius, H. Balkan, Appl. Phys. Lett. 80(4), 580 (2002)
H.A. Le, N.C. Tso, T.A. Rost, C.U. Kim, Appl. Phys. Lett. 72, 2814 (1992)
C.Y. Liu, L. Ke, Y.C. Chuang, S.J. Wang, J. Appl. Phys 100, 083702 (2006)
C.T. Lin, Y.C. Chuang, S.J. Wang, C.Y. Liu, Appl. Phys. Lett. 89, 101906 (2006)
B. Chao, S.H. Chae, X.F. Zhang, K.H. Lu, M. Ding, J. Im, P.S. Ho, J. Appl. Phys. 100, 084909 (2006)
J.W. Nah, K. Chen, K.N. Tu, B.R. Su, C. Chen, J. Mater. Res. 22, 763 (2007)
D. Ma, W.D. Wang, S.K. Lahiri, J. Appl. Phys. 91, 3312 (2002)
K.N. Tu, J. Appl. Phys. 94, 545 (2003)
A. Gangulee, F.M. d’Heurle, Thin Solid Films 16, 227 (1973)
I. Ames, F.M. d’Heurle, R.E. Horstman, IBM J. Res. Dev. 4, 461 (1970)
C.C. Lu, S.J. Wang, C.Y. Liu, J. Electron. Mater. 32, 1515. (2003)
C.C. Wei, C.Y. Liu, J. Mater. Res. 20, 2072 (2005)
K.L. Lee, C.K. Hu, K.N. Tu, J. Appl. Phys. 78, 4428 (1995)
H.B. Huntington, in Electromigration in Metals, ed. by A.S. Nowick, J.J. Burton. Diffusion in Solidsá Recent Developments (Academic Press, New York, 1979), pp. 303–352
A. Gangulee, F.M. d’Heurle, Thin Solid Films 16(2), 227 (1973)
R. Lloyd, J.J. Clement, Appl. Phys. Lett. 69, 2486 (1996)
E.K. van, J.P. Dekker, A. Lodder, Phys. Rev. B 52, 8794 (1995)
H.W. Tseng, C.T. Lu, Y.H. Hsiao, P.L. Liao, Y.C. Chuang, T.Y. Chung, C.Y. Liu, Microelectron. Reliab. 50, 1159 (2010)
C.Y. Liu, Advanced Packaging Materials (APM), in 2013 IEEE International Symposium on IEEE, pp. 32–35 (2013)
W.J. Deng, K.L. Lin, Y.T. Chiu, S.Y. Lai, in IEEE 61st Electronic Components and Technology Conference (ECTC). IEEE, pp. 114–117 (2011)
Z. Mei, A.J. Sunwoo, J.W. Morris Jr., Metall. Trans. A 23 A, 857 (1992)
Acknowledgements
This work was supported in part by the program MOST104-2221-E-008 -112 -MY3, MOST 104-2221-E-008 -112 -MY3 and MOST105-3113-E-008-008-CC2.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Lin, E.J., Hsu, Y.C., Chuang, Y.C. et al. Effect of interfacial dissolution on electromigration failures at metals interface. J Mater Sci: Mater Electron 28, 15149–15153 (2017). https://doi.org/10.1007/s10854-017-7391-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-017-7391-7