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Pulsed laser deposited ZnO films and their humidity sensing behavior

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Abstract

The present paper describes an opto-electronic humidity sensor based on thin film of zinc oxide prepared by pulsed laser deposition method. Being optical in nature it gives electromagnetic disturbance-free monitoring. The sensing element is a right-angled isosceles prism with its base coated with ZnO thin film. Films have been characterized by XRD, SEM, and optical transmission. Film grown with substrate at room temperature is amorphous whereas that grown at elevated temperature is single crystalline with grain size 38.52 nm. Film deposited at room temperature is sensitive to humidity over a wide range i.e. 5–90RH% while that deposited at elevated temperature is found to be insensitive to humidity. The sensor shows better sensitivity for higher range of humidity. The response and recovery time of the sensor element have also been evaluated. This sensor configuration can be used for on-line applications and in-situ monitoring.

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References

  1. P.D. Harris, M.K. Andrews, Sensors VI Technology and Applications (Institute of Physics Publishing, U. K.), p. 435

  2. R. Anchisini, G. Faglia, M.C. Gallazzi, G. Sberveglieri, G. Zerbi, Sensor Actuat. B 35–36, 99 (1996)

    Article  Google Scholar 

  3. J. Ying, C. Wan, P. He, Sensor World 12, 25 (1997)

    Google Scholar 

  4. W.-P. Tai, J.-G. Kim, J.-H. Oh, Y.-S. Kim, Sensor Actuat. B 105, 199 (2005)

    Article  CAS  Google Scholar 

  5. P.M. Faia, C.S. Furtado, A.J. Ferreira, Sensor Actuat. B 101, 183 (2004)

    Article  CAS  Google Scholar 

  6. P. Misra, R.K. Shukla, L.M. Bali, C. Gupta, G.C. Dubey, Sensor Actuat. B 94, 210 (2003)

    Article  CAS  Google Scholar 

  7. B.C. Yadav, R.K. Shukla, Ind. J. Pure Appl. Phys. 41, 681 (2003)

    CAS  Google Scholar 

  8. B.C. Yadav, R.K. Shukla, L.M. Bali, Ind. J. Pure Appl. Phys. 43, 51 (2005)

    CAS  Google Scholar 

  9. L. Xu, J.C. Fanguy, K. Soni, S. Tao, Opt. Lett. 29, 1191 (2004)

    Article  CAS  Google Scholar 

  10. S. Muto, O. Suzuki, T. Amano, M. Morisawa, Meas. Sci. Technol. 14, 746 (2003)

    Article  CAS  Google Scholar 

  11. R. Jindal, S. Tau, J.P. Singh, P.S. Gaikwad, Opt. Eng. 41(5), 1093 (2002)

    Article  Google Scholar 

  12. Z.A. Ansari, R.N. Karekar, R.C. Aiyer, Thin Solid Films 305, 330 (1997)

    Article  CAS  Google Scholar 

  13. A.M.E. Suresh Raj, C.M. Magadalne, K.S. Nagaraja, Phys. Stat. Sol. (A) 191, 230 (2002)

    Article  Google Scholar 

  14. G. Montesperelli, A. Pumo, G. Gusmano, A. Bearzotti, A. Montenero, G. Gnappi, E. Traversa, Sensor Actuat. B 25, 705 (1995)

    Article  Google Scholar 

  15. M. Bayhan, T. Hashemi, A.W. Brinkman, J. Mater. Sci. 32, 6619 (1997)

    Article  CAS  Google Scholar 

  16. L.M. Bali, A. Srivastava, R.K. Shukla, A. Srivastava, Opt. Eng. 38(10), 1715 (1999)

    Article  Google Scholar 

  17. O. Garcia-Martinez, R.M. Vojas, E. Vila, J.J. Martin De Vidales, Solid State Ionics 63–65, 442 (1993)

    Article  Google Scholar 

  18. H. Sawada, R. Wang, A.W. Sleight, J. Solid State Chem. 122, 148 (1996)

    Article  CAS  Google Scholar 

  19. J.R. Brown, P.W. Haycock, L.M. Smith, A.C. Jones, E.W. Williams, Sensor Actuator 63(1), 109 (2000)

    Article  Google Scholar 

  20. K. Arshak, K. Twomey, Sensors 2, 205 (2002)

    Article  CAS  Google Scholar 

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Acknowledgment

Anchal S. and RKS thank University Grants Commission, New Delhi, India for financial assistance. The authors also thank Dr. L. M. Kukreja and P. Misra, Thin Film Lab, RRCAT, Indore, India for providing facilities for growing the films. Authors are thankful to the anonymous reviewer for the insightful comments.

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Authors and Affiliations

  1. Department of Physics, University of Lucknow, Lucknow, 226007, India

    Shobhna Dixit, Anchal Srivastava, R. K. Shukla & Atul Srivastava

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  1. Shobhna Dixit
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  2. Anchal Srivastava
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  3. R. K. Shukla
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  4. Atul Srivastava
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Correspondence to R. K. Shukla.

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Dixit, S., Srivastava, A., Shukla, R.K. et al. Pulsed laser deposited ZnO films and their humidity sensing behavior. J Mater Sci: Mater Electron 19, 788–792 (2008). https://doi.org/10.1007/s10854-007-9414-2

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  • DOI: https://doi.org/10.1007/s10854-007-9414-2

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