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Densification and crystallization in crystallizable low temperature co-fired ceramics

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Abstract

This article reports the impact of one critical process parameter, the heating rate during sintering from 530 to 850 °C, on the densification of a crystallized low temperature co-fired ceramics (LTCC). At a low heating rate the densification of LTCC is impeded by the competing crystallization processes, resulting in less shrinkage, lower density and consequently lower dielectric constant. Microstructural evidence is provided to analyze the multiple crystalline phases formed during sintering process. It is concluded that an optimized sintering profile should have a heating rate that allows full densification prior to onset of crystallization, follow by a full crystallization to limit the amount of residual glass for enhanced dielectric properties.

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Acknowledgements

The author thanks Dr Ping Lu for TEM analysis, Dr Mark Rodriguez for XRD work, Bonnie Mckenzie for SEM characterization, Tom Chavez and Dennis De Smet for help in sample fabrication and measurement, and Dr Kevin Ewsuk for his critical review of the manuscript. The author also would like to thank Mr Deepukumar M. Nair of DuPont Microelectronic Materials for validation measurement of dielectric constants and quality factors. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-AC04-94AL85000.

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  1. Sandia National Laboratories, P.O. Box 5800, MS 0959, Albuquerque, NM, 87185-1349, USA

    Steve Dai

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  1. Steve Dai
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Correspondence to Steve Dai.

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Dai, S. Densification and crystallization in crystallizable low temperature co-fired ceramics. J Mater Sci 47, 4579–4584 (2012). https://doi.org/10.1007/s10853-012-6318-1

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  • DOI: https://doi.org/10.1007/s10853-012-6318-1

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