Skip to main content
SpringerLink
Log in

Annealing effect on the structural, optical, and electrical properties of CuAlO2 films deposited by magnetron sputtering

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

We studied the annealing effect on the structural, optical, and electrical properties of sputtered CuAlO2 films. It is found that the crystallinity of CuAlO2 films is improved with increasing the annealing temperature in N2 ambient, and the film annealed at 900 °C presents the excellent preferred (001) orientation in X-ray diffraction patterns as well as Raman scattering signals, A1g and Eg. The optical absorption edge of the annealed films is observed extremely complex. Four optical bandgaps estimated are distributed in the following energy regions: ~3.00, ~3.15, ~3.50, and ~3.75 eV, which might originate from different direct transitions in CuAlO2 energy band, respectively. For the annealed CuAlO2 films, the resistivity decreases three orders of magnitude, which is attributed to the contribution of intrinsic defects, Cu vacancy and interstitial oxygen.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. Kawazoe H, Yasukawa M, Hyodo H, Kurita M, Yanagi H, Hosono H (1997) Nature 389:939

    Article  CAS  Google Scholar 

  2. Yanagi H, Inoue S, Ueda K, Kawazoe H, Hosono H, Hamada N (2000) J Appl Phys 88:4159

    Article  CAS  Google Scholar 

  3. Gong H, Wang Y, Luo Y (2000) Appl Phys Lett 76:3959

    Article  CAS  Google Scholar 

  4. Banerjee AN, Chattopadhyay KK (2005) J Appl Phys 97:084308

    Article  Google Scholar 

  5. Ong CH, Gong H (2003) Thin Solid Films 445:299

    Article  CAS  Google Scholar 

  6. Banerjee AN, Kundoo S, Chattopadhyay KK (2003) Thin Solid Films 440:5

    Article  CAS  Google Scholar 

  7. Tonooka K, Shimokawa K, Nishimura O (2002) Thin Solid Films 411:129

    Article  CAS  Google Scholar 

  8. Bouzidi C, Bouzouita H, Timoumi A, Rezig B (2005) Mater Sci Eng B 118:259

    Article  Google Scholar 

  9. Lan W, Zhang M, Dong GB, Dong PM, Wang YY, Yan H (2007) Mater Sci Eng B 139:155

    Article  CAS  Google Scholar 

  10. Ishiguro T, Ishizawa N, Mizutani N, Kato M, Tanaka K, Marumo F (1983) Acta Crystallogr, B: Struct Sci 39:564. Calculated from ICSD using POWD-12 ++, (1997)

    Article  Google Scholar 

  11. Lambert JC, Eysel W (1980) Mineralogical-Petrograph. Institute, Universitat Heidelberg, ICDD Grant-in-Aid, Germany

    Google Scholar 

  12. Tunell G, Posnjak E, Ksanda CJ, Kristallogr Z (1935) Kristallgeom Kristallphys Kristallchem 90:120. Calculated from ICSD using POWD-12 ++, (1997)

    CAS  Google Scholar 

  13. Pellicer-Porres J, Martínez-García D, Segura A, Rodríguez-Hernández P, Muñoz A, Chervin JC, Garro N, Kim D (2006) Phys Rev B 74:184301

    Article  Google Scholar 

  14. Ingram BJ, Mason TO, Asahi R, Park KT, Freeman AJ (2001) Phys Rev B 64:155114

    Article  Google Scholar 

  15. Nie X, Wei SH, Zhang SB (2002) Phys Rev Lett 88:066405

    Article  Google Scholar 

  16. Jayalakshmi V, Murugan R, Palanivel B (2005) J Alloys Compd 388:19

    Article  CAS  Google Scholar 

  17. Pellicer-Porres J, Segura A, Gilliland AS, Muñoz A, Rodríguez-Hernández P, Kim D, Lee MS, Kim TY (2006) Appl Phys Lett 88:181904

    Article  Google Scholar 

  18. Benko FA, Koffyberg FP (1984) J Phys Chem Solids 45:57

    Article  CAS  Google Scholar 

  19. Kawazoe H, Yanagi H, Ueda K, Hosono H (2000) Mater Res Bull 8:28

    Article  Google Scholar 

  20. Cai JL, Gong H (2005) J Appl Phys 98:033707

    Article  Google Scholar 

  21. Yu RS, Liang SC, Lu CJ, Tasi DC, Shieu FS (2007) Appl Phys Lett 90:191117

    Article  Google Scholar 

  22. Zhang SB, Wei SH, Zunger A (2001) Phys Rev B 63:075205

    Article  Google Scholar 

  23. Banerjee AN, Maity R, Ghosh PK, Chattopadhyay KK (2005) Thin Solid Films 474:261

    Article  CAS  Google Scholar 

  24. Katayama-Yoshida H, Koyanagi T, Funashima H, Harima H, Yanase A (2003) Solid State Commun 126:135

    Article  CAS  Google Scholar 

  25. Katayama-Yoshida H, Sato K, Kizaki H, Funashima H, Hamada I, Fukushima T, Dinh VA, Toyoda M (2007) Appl Phys A 89:19

    Article  CAS  Google Scholar 

Download references

Acknowledgements

The authors would like to acknowledge the financial support by the National Natural Science Foundation of China (No. 50802037), the Excellent Persons in Science and Engineering of Beijing (20061D0501500199), and the Youth Teacher Sustentation Plan of School of Physical Science and Technology of Lanzhou University (No. WL200705).

Author information

Authors and Affiliations

  1. Department of Physics, School of Physical Science and Technology, Lanzhou University, Lanzhou, 730000, People’s Republic of China

    W. Lan, W. L. Cao, X. Q. Liu, Y. Y. Wang & E. Q. Xie

  2. The College of Materials Science and Engineering, Beijing University of Technology, Beijing, 100022, People’s Republic of China

    W. Lan, M. Zhang & H. Yan

Authors
  1. W. Lan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. W. L. Cao
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. X. Q. Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Y. Y. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. E. Q. Xie
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. H. Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to W. Lan.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lan, W., Cao, W.L., Zhang, M. et al. Annealing effect on the structural, optical, and electrical properties of CuAlO2 films deposited by magnetron sputtering. J Mater Sci 44, 1594–1599 (2009). https://doi.org/10.1007/s10853-008-3229-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10853-008-3229-2

Keywords

Search

Navigation