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High mobility organic transistor patterned by the shadow-mask with all structure on a plastic substrate

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An Erratum to this article was published on 01 April 2007

Abstract

Pentacene thin film transistors fabricated without photolithographic patterning were fabricated on the plastic substrates. Both the organic/inorganic thin films and metallic electrode were patterned by shifting the position of the shadow-mask which accompanies the substrate throughout the deposition process. By using an optically transparent zirconium oxide (ZrO2) as a gate insulator and octadecyltrimethoxysilane (OTMS) as an organic molecule for self-assembled monolayer (SAM) to increase the adhesion between the plastic substrate and gate insulator and the mobility with surface treatment, high-performance transistor with field effect mobility 0.66 cm2/V s and I on/I off > 105 was formed on the plastic substrate. This technique will be applicable to all structure deposited at low temperature and suitable for an easy process for flexible display.

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Reference

  1. Nelson SF, Lin Y-Y, Gundlach DJ, Jackson TN (1998) Appl Phys Lett 72:1854

    Article  CAS  Google Scholar 

  2. Sheraw CD, Zhou L, Huang JR, Gundlach DJ, Jackson TN, Kane MG, Hill IG, Hammond MS, Campi J, Greening BK, Francl J, West J (2002) Appl Phys Lett 80:1088

    Article  CAS  Google Scholar 

  3. Dimitrakopoulos CD, Kymissis I, Purushothaman S, Neumayer DA, Duncombe PR, Laibowitz RB (1999) Adv Mater (Weinheim, Ger) 11:1372

    Article  CAS  Google Scholar 

  4. Dimitrakopoulos CD, Purushothaman S, Kymissis I, Callegair A, Shaw JM (1999) Science 283:822

    Article  CAS  Google Scholar 

  5. Dimitrakopouls CD, Brown AR, Pomp A (1996) J Appl Phys 80:2501

    Article  Google Scholar 

  6. Gundlacha DJ, Schlom DG, Nelson SF, Jackson TN (1999) Appl Phys Lett 74:3302

    Article  Google Scholar 

  7. Jackson TN, Lin YY, Gundlach DJ, Klauk H (1998) IEEE J Sel Top Quantum Electron 4:1

    Article  Google Scholar 

  8. Copel M, Gribelyuk M, Gusev EP (2000) Appl Phys Lett 76:436

    Article  CAS  Google Scholar 

  9. Jeon S, White JM, Kwong DL (2001) Appl Phys Lett 78:368

    Article  CAS  Google Scholar 

  10. Robertson J (2000) J Vac Sci Technol B 18:1785

    Article  CAS  Google Scholar 

  11. Urlacher C, Marco de Luca C, Bernstein E, Jacquier B, Mugnier J (1999) Opt Mater (Amsterdam, Neth) 12:19

    Article  CAS  Google Scholar 

  12. Mcleod HA (1986) Thin film optical filters, 2nd edn. Adam Hilger, Bristol, 519 pp

  13. Mooney JF, Hunt AJ, Mcintosh JR, Liberko CA, Walba DM, Rogers CT (1996) Proc Natl Acad Sci USA 93:12287

    Article  CAS  Google Scholar 

  14. Parikh AN, Allara DL, Azouz IB, Rondelez F (1994) J Phys Chem 98:7577

    Article  CAS  Google Scholar 

  15. Brzoska JB, Azouz IB, Rondelezz F (1994) Langmuir 10:4367

    Article  CAS  Google Scholar 

Download references

Acknowledgment

This work was supported by grant No. 2M18850 from the project of NANO TECHNOLOGY RESEARCH ASSOCIATION.

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Authors and Affiliations

  1. Opto-Electric Materials Research Center, Korea Institute of Science and Technology, Seoul, 136-791, Korea

    Joo-Won Lee & Jai-Kyeong Kim

  2. Department of Physics, Kyunghee University, Seoul, 130-701, Korea

    Joo-Won Lee & Jin Jang

  3. Department of Electrical Engineering, Korea University, Anam-Dong, Seongbuk-Gu, Seoul, 136-701, Korea

    Byeong-Kwon Ju

  4. Department of Advanced Technology Fusion, Konkuk University, Hwayang-dong Gwangjin-gu, Seoul, 143-701, Korea

    Young-Soo Yoon

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  1. Joo-Won Lee
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  2. Byeong-Kwon Ju
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  3. Jin Jang
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  5. Jai-Kyeong Kim
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Correspondence to Joo-Won Lee.

Additional information

An erratum to this article is available at https://doi.org/10.1007/s10853-007-1573-2.

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Lee, JW., Ju, BK., Jang, J. et al. High mobility organic transistor patterned by the shadow-mask with all structure on a plastic substrate. J Mater Sci 42, 1026–1030 (2007). https://doi.org/10.1007/s10853-006-1046-z

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  • DOI: https://doi.org/10.1007/s10853-006-1046-z

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