Laser-induced breakdown spectroscopy (LIBS) was applied to depth profile analysis and thickness measurements of a nanometric copper layer deposited on a steel substrate. In this technique, several laser pulses are successively delivered to the same position of the layer surface. It was shown that a minimum ablation rate was achieved at a laser pulse energy of 7 mJ and a lens-to-sample distance (LTSD) of 33 mm (target was moved 2 mm from the focal point toward a lens).
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Published in Zhurnal Prikladnoi Speksrosopii, Vol. 80, No. 1, pp. 157–160, 2013.
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Ardakani, H.A., Tavassoli, S.H. Depth profile analysis of nanometric layers by laser-induced breakdown spectroscopy. J Appl Spectrosc 80, 153–157 (2013). https://doi.org/10.1007/s10812-013-9738-z
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DOI: https://doi.org/10.1007/s10812-013-9738-z