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Uncertainty Analysis of Evaporation Rate in Magnetic Suspension Balance/Diffusion-Tube Humidity Generator

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Abstract

An analysis method for the uncertainty of a small evaporation rate in a magnetic suspension balance/diffusion-tube humidity generator has been developed. Using experimentally obtained data, the uncertainty is evaluated as a function of measurement time. It is found that the observed standard deviation of the evaporation rate in a region of short measurement time (short term) is inversely proportional to the measurement time, and that in a region of long measurement time (long term) the standard deviation does not vary markedly with increasing measurement time. The behavior of the observed standard deviation in the short term is attributable mainly to the uncertainty of the balance reading, and that in the long term to the variability of room temperature. The results of the investigation show that the use of only least-squares analysis leads to underestimation of the uncertainty.

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References

  • International Technology Roadmap for Semiconductors (2006) http://www.itrs.net/reports.html

  • Funke H.H., Grissom B.L., McGrew C.E., Raynor M.W. (2003) Rev. Sci. Instrum. 74, 3909

    Article  ADS  Google Scholar 

  • See, for example, A.-N. Nowak, P. Konieczka, A. Przyjazny, J. Namieśnik, Crit. Rev. Anal. Chem. 35, 31 (2005); S. Tumbiolo, L. Vincent, J.-F. Gal, P.-C. Maria, Analyst 130, 1369 (2005)

  • ASTM D 4298-95, Standard Guide for Intercomparing Permeation Tubes to Establish Traceability (ASTM International, United States, 1999)

  • ISO 6145-10, Gas analysis-Preparation of calibration gas mixtures using dynamic volumetric methods-Part10: Permeation method (International Organization for Standardization, Geneva, 2002)

  • ISO 6145-8, Gas analysis-Preparation of calibration gas mixtures using dynamic volumetric methods-Part8: Diffusion method (International Organization for Standardization, Geneva, 2005)

  • O’Keefe A., Deacon D.A.G. (1988) Rev. Sci. Instrum. 59, 2544

    Article  ADS  Google Scholar 

  • Romanini D., Lehmann K.K. (1993) J. Chem. Phys. 99, 6287

    Article  ADS  Google Scholar 

  • Berden G., Peeters R., Meijer G. (2000) Int. Rev. Phys. Chem. 19, 565

    Article  Google Scholar 

  • Abe H., Kitano H. (2007) Sens. Actuators A: Phys. 136, 723

    Article  Google Scholar 

  • Abe H., Kitano H. (2006) Sens. Actuators A: Phys. 128, 202

    Article  Google Scholar 

  • ISO, Guide to the Expression of Uncertainty in Measurement (International Organization for Standardization, Geneva, 1995)

  • R. Schwartz, in Comprehensive Mass Metrology, ed. by M. Kochsiek, M. Gläser (Wiley-VCH, Berlin, 2000), p. 248

  • Knopf D. (2001) Accred. Qual. Assur. 6, 113

    Article  Google Scholar 

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Authors and Affiliations

  1. National Metrology Institute of Japan (NMIJ), AIST, Tsukuba Central 3, Tsukuba, 305-8563, Japan

    H. Abe, H. Tanaka & H. Kitano

Authors
  1. H. Abe
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  2. H. Tanaka
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  3. H. Kitano
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Correspondence to H. Abe.

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Abe, H., Tanaka, H. & Kitano, H. Uncertainty Analysis of Evaporation Rate in Magnetic Suspension Balance/Diffusion-Tube Humidity Generator. Int J Thermophys 29, 1555–1566 (2008). https://doi.org/10.1007/s10765-007-0350-4

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  • DOI: https://doi.org/10.1007/s10765-007-0350-4

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