Abstract
Using 100Pd/100Rh probes, perturbed angular correlation measurements were performed to study Pd-related defects in Si as a function of dopant concentration and dopant type. Pd-vacancy and Pd-B complexes were identified by their characteristic electric field gradients in highly doped n- and p-type Si, respectively. Both pairs exhibited a T3/2 temperature dependence of their electric field gradients.
Similar content being viewed by others
References
Sachse, J.-U., Jost, W., Weber, J., Lemke, H.: Trivalent behavior of palladium in silicon. Appl. Phys. Lett. 71, 1379 (1997)
Wang, L., Yao, X.C., Zhou, J., Qin, G.G.: Energy levels and symmetries of palladium centers in silicon. Phys. Rev. B 38, 13494 (1988)
Woodbury, H.H., Ludwig, G.W.: Spin resonance of Pd and Pt in Silicon. Phys. Rev. B 126, 466 (1962)
Watkins, G.D.: Deep levels in semiconductors. Physica. B 117–118, 9 (1983)
Ammerlaan, C.A.J., van Oosten, A.B.: Electronic structure of platinum in silicon. Physica Scripta. T25, 342 (1989)
Brett, D.A., Dogra, R., Byrne, A.P., Mestnik-Filho, J., Ridgway, M.C.: Pd vacancy complex in Si identified with the perturbed angular correlation technique. Phys. Rev. B 72, 193202 (2005)
Vicente, J., Enríquez, L., Rubio, E., Bailón, L., Barbolla, J.: In-diffusion and annealing kinetics of palladium in silicon. J. Electrochem. Soc. 140, 868 (1993)
Wu, J., Zhou, J., Zhang, D.: Theoretical study of the PD–B complex in silicon. J. Appl. Phys. 67, 7139 (1990)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Dogra, R., Byrne, A.P., Brett, D.A. et al. Characterization of palladium-related defects in silicon. Hyperfine Interact 177, 33–37 (2007). https://doi.org/10.1007/s10751-008-9618-8
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10751-008-9618-8