Abstract
The CAPEX-U (CAPillary EXperiment-Upgrade) apparatus has been developed as an XUV source based on high-current capillary discharge. Our main motivation for building such new device was to create the XUV source with amplification of spontaneous emission at shorter wavelengths (below 20 nm), which have more practical applications (the soft X-ray source for lithography and microscopy). The final experimental setup of the new device is described and the preliminary experimental results of the assembled apparatus are presented, especially the capillary current signal, and the time development of the pulse-forming-line voltage. The comparison of these experimental results with calculated/predicted values is reported in this paper as well.
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Schmidt, J., Kolacek, K., Frolov, O. et al. Comparing of calculated and experimental results of CAPEX-U device. Czech J Phys 56 (Suppl 2), B371–B376 (2006). https://doi.org/10.1007/s10582-006-0224-1
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DOI: https://doi.org/10.1007/s10582-006-0224-1