Abstract
A hydrophone with maximum sensitivity and bandwidth is required for many underwater and medical applications. This paper presents a first time multi-objective optimization of a 3D MEMS bionic vector hydrophone. The hydrophone has four beams with a cilium at the center of its proof mass. Finite element method is used for modeling the hydrophone performance. Since achieving optimum sensitivity conflicts with achieving the optimum bandwidth, a multi-objective particle swarm optimization has been used. The structural parameters of the hydrophone have been optimized as design variables. Compromisation between the sensitivity and the bandwidth has been performed and discussed with the help of the concept of Pareto front. Helpful compromisation strategies for selecting the desired design with determined values of sensitivity and bandwidth have been proposed. A method for the wise selection of the most effective design variables has also been presented. The optimization results are obtained in both the objective and the variable spaces, and the capability of each space to optimize the structure is introduced. In the objective space, it was found that this structure has the ability to reach a sensitivity of -167.2 dB and a resonant frequency of 77,544 Hz. Although Pareto front points are not dominant over each other, several sample strategies have been introduced to select the final design. Understanding the variable space specifications not only helps the designers in determining the impact of each parameter on the objectives but also provides the ability to compromise between them based on the designer’s need.
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The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.
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Saheban, H., Kordrostami, Z. & Hamedi, S. A multi-objective optimization of sensitivity and bandwidth of a 3-D MEMS bionic vector hydrophone. Analog Integr Circ Sig Process 110, 455–467 (2022). https://doi.org/10.1007/s10470-021-01975-z
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DOI: https://doi.org/10.1007/s10470-021-01975-z