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Fabrication of microcopper arcs using localized electrochemical deposition

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Abstract

Local electrochemical deposition is a fabrication method that has great advantages for three-dimensional microstructures. In this study, for non-uniform arc widths deposited using a closed anode, an open anode was employed. Arcs were deposited under different applied voltages, step angles, and diameters. The difference in arc uniformity caused by the two types of anodes was analyzed using COMSOL simulations. The results showed that the arcs deposited using an open anode were more uniform than those deposited using a closed anode.

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Authors and Affiliations

  1. State Key Laboratory of High Performance Complex Manufacturing, Changsha, 410083, People’s Republic of China

    Fuliang Wang, Zhibin Chu & Kai Niu

  2. School of Mechanical and Electrical Engineering, Central South University, Changsha, 410083, People’s Republic of China

    Fuliang Wang, Zhibin Chu & Kai Niu

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  1. Fuliang Wang
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  2. Zhibin Chu
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  3. Kai Niu
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Correspondence to Fuliang Wang.

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Wang, F., Chu, Z. & Niu, K. Fabrication of microcopper arcs using localized electrochemical deposition. J Solid State Electrochem 27, 1983–1991 (2023). https://doi.org/10.1007/s10008-023-05440-x

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  • DOI: https://doi.org/10.1007/s10008-023-05440-x

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