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Design of a super-wideband on-chip antenna with improved characteristics using bulk micromachining

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Abstract

In this article, a novel, miniaturized, CPW fed, monopole on-chip antenna with enhanced bandwidth and gain is proposed for super wideband (SWB) application. First, an SWB on-chip antenna of size 4.2 × 4.2 × 0.6775 mm3 is designed by incorporating slots in the rectangular radiating patch. The operating frequency band of the designed antenna is observed as 0.7–17.5 GHz providing a bandwidth ratio and a fractional bandwidth of 25 and 184.62%, respectively, and the maximum gain is obtained as − 5.7 dBi. Then, an air cavity is introduced just beneath the patch using bulk micromachining technique. Introduction of the air cavity improves the bandwidth and gain of the antenna. The proposed antenna now achieves |S11| ≤ − 10 dB from 0.7 to 21.8 GHz, offering a bandwidth ratio and a fractional bandwidth of 31.14 and 187.56%, respectively. The micromachined SWB antenna offers the highest bandwidth dimension ratio (BDR) among the related reported works. The proposed antenna offers a stable radiation pattern over the entire wide impedance bandwidth and provides a maximum gain of − 1.8 dBi. It also exhibits good time-domain characteristics having group delay variation of less than 1.25 ns throughout the operating bandwidth. The proposed antenna prototype is fabricated and tested as well. A good agreement is observed between the simulated results and the experimental outcomes.

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[Courtesy: Semi-conductor Laboratory, Chandigarh]

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Acknowledgements

The authors gracefully acknowledge financial support provided by Visvesvaraya PhD scheme, Ministry of Communications and Information Technology, Govt. of India, Grant No. PhD-MLA/4(29)/2015-16/01 and Special Manpower Development Programme for Chips-to-System Design (SMDP-C2SD) under Govt. of India, Grant No. 9(1)/2014-MDD (Vol III). The authors are also thankful to Semi-Conductor Laboratory (SCL), Chandigarh for providing fabrication and measurement facility.

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Correspondence to Sanjukta Mandal.

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Mandal, S., Mandal, S.K., Mal, A.K. et al. Design of a super-wideband on-chip antenna with improved characteristics using bulk micromachining. Microsyst Technol 28, 937–946 (2022). https://doi.org/10.1007/s00542-021-05242-z

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  • DOI: https://doi.org/10.1007/s00542-021-05242-z

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