Skip to main content
Log in

Optimization of a synthetic jet based piezoelectric air pump and its application in electronic cooling

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

In this paper, the optimization is carried out for a synthetic jet based piezoelectric air pump. The structural parameters which affect the output flowrate are determined and orthogonal test method is used to find out the optimal values of these parameters. Driven by a 150 Vpp, 3.15 kHz sinusoidal voltage signal, the optimized pump reaches its maximum output flowrate of 2.79 L/min, which is 32.9% higher than that before optimization. Using the synthetic jet based piezoelectric air pump as gas source, an open-loop detection and closed-loop control system is built for electronic cooling. The open-loop experiments show that the heater’s surface temperature can be maintained at around 97.9 °C when the cooling distance is 60 mm, which is 32.5% lower than the initial value. The closed-loop control system can limit the temperature within the set interval. Both the open and closed-loop system show that the synthetic jet based piezoelectric air pump has application prospects in the field of electronic cooling.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  • Alrashdan M, Hamzah A, Majlis B (2015) Design and optimization of cantilever based piezoelectric micro power generator for cardiac pacemaker. Microsyst Technol 21:1607–1617

    Article  Google Scholar 

  • Deng X, Luo ZB, Xia ZX et al (2017) Active-passive combined and closed-loop control for the thermal management of high-power LED based on a dual synthetic jet actuator. Energy Convers Manag 132:207–212

    Article  Google Scholar 

  • Dong JS, Chen WH, Zeng P et al (2017) Design and experimental research on piezoelectric pump with triple vibrators. Microsyst Technol 23:3019–3026

    Article  Google Scholar 

  • Fisher R, Nishino T, Savill M (2017) Numerical analysis of a bidirectional synthetic jet for active flow control. AIAA J 55(3):1064–1069

    Article  Google Scholar 

  • Ghaffari O, Solovitz SA, Ikhlaq M et al (2016) An investigation into flow and heat transfer of an ultrasonic micro-blower device for electronics cooling applications. Appl Therm Eng 106:881–889

    Article  Google Scholar 

  • He XH, Xu L, Zhang XT et al (2016) A bidirectional valveless piezoelectric micropump with three chambers applying synthetic jet. J Mech Sci Technol 30(9):4015–4022

    Article  Google Scholar 

  • Jalilvand A, Mochizuki M, Saito Y et al (2015) Cooling performance evaluation of synthetic jet based thermal solution module. J Therm Sci Eng Appl 7:031010-1–031010-9

    Article  Google Scholar 

  • Liu C, Zhu YC (2019) Simulation and experimental study of direct spray type piezoelectric air pumps based on synthetic jet. Microsyst Technol 25:4445–4454

    Article  Google Scholar 

  • Ma HK, Chen RH, Yu NS et al (2016) A miniature circular pump with a piezoelectric bimorph and a disposable chamber for biomedical applications. Sens Actuators A 251:108–118

    Article  Google Scholar 

  • Memik S (2015) Heat management in integrated circuits: on-chip and system-level monitoring and cooling. Institution of Engineering and Technology, London, pp 1–9

    Google Scholar 

  • Okada K, Nonomura T, Fujii K et al (2012) Computational analysis of vortex structures induced by a synthetic jet to control separated flows. Int J Flow Control 4:47–66

    Article  Google Scholar 

  • Persoons T, Cressall R, Alimohammadi S (2018) Validating a reduced-order model for synthetic jet actuators using CFD and experimental data. Actuators 7:1–17

    Article  Google Scholar 

  • Revathi S, Padmanabhan R (2016) Study of the effect on flow rate for planar type polymer-based diaphragm piezoelectric actuated valveless micropump for insulin delivery. Adv Mater Process Technol 2(1):31–43

    Google Scholar 

  • Sateesh J, Girija K, Akshay R et al (2018) Design and flow analysis of MEMS based piezo-electric micro pump. Microsyst Technol 24:1609–1614

    Article  Google Scholar 

  • Smith BL, Glezer A (1998) The formation and evolution of synthetic jets. Phys Fluids 10(9):2281–2297

    Article  MathSciNet  Google Scholar 

  • Tang H, Zhong S (2006) Incompressible flow model of synthetic jet actuators. AIAA J 44(4):908–912

    Article  Google Scholar 

  • Wang X (2017) Simulation analysis and experimental research of resonant air piezoelectric pump based on synthetic jet. Jilin University, Changchun, China

    Google Scholar 

  • Wang L, Feng LH, Wang JJ et al (2018) Characteristics and mechanism of mixing enhancement for noncircular synthetic jets at low Reynolds number. Exp Therm Fluid Sci 98:731–743

    Article  Google Scholar 

  • Xu XM, Li XC, Zhou J et al (2017) Numerical and experimental analysis of cold gas microthruster geometric parameters by univariate and orthogonal method. Microsyst Technol 23:5003–5016

    Article  Google Scholar 

  • Yuan SQ, Yang S, He XH et al (2015) Design and experimental study of a novel three-way diffuser/nozzle elements employed in valveless piezoelectric micropumps. Br Soc Mech Sci Eng 37:221–230

    Article  Google Scholar 

Download references

Acknowledgments

The authors would like to acknowledge the financial support from the National Science Foundation of China (Grant No. 51575258; 51975275) and the Foundation of Graduate Innovation Center in NUAA (Grant No. kfjj20180503).

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yuchuan Zhu.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Liu, C., Zhu, Y. & Wu, C. Optimization of a synthetic jet based piezoelectric air pump and its application in electronic cooling. Microsyst Technol 26, 1905–1914 (2020). https://doi.org/10.1007/s00542-019-04743-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-019-04743-2

Navigation