Abstract
In this study, high-density carbon nanotubes (CNTs) are grown on an oxidized Si substrate by thermal chemical vapor deposition (CVD). CNTs were synthesized by thermal CVD at 700 °C in C2H2 atmosphere and used to fabricate a propanone gas sensor. The average length and diameter of the CNTs were ~ 4.52 and ~ 45 nm, respectively. Au nanoparticles were coated onto nanotube surfaces to a thickness of ~ 5 nm, and the formed CNTs could be utilized to sense propanone vapor. The sensitivity of the carbon nanotube propanone gas sensor was 2.98% under the concentration of 800 ppm propanone vapor at room temperature.
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Acknowledgements
This work was supported by the Ministry of Science and Technology under contract numbers MOST 106-2221-E-150-041-MY3, 106-2622-E-150-005-CC3, and 106-2622-E-150-017-CC2. We also acknowledge the assistance of the Common Laboratory for Micro/Nano Science and Technology of the National Formosa University for some of the measurement equipment used in this study, the Center for Micro/Nano Science and Technology of National Cheng Kung University for device characterization, and Dr. C. H. Hsiao and Dr. C. S. Huang for device fabrication and equipment support.
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Lam, A.D.KT., Lin, ZD., Lu, HY. et al. Carbon nanotubes with adsorbed Au nanoparticles for sensing propanone gas. Microsyst Technol 28, 209–212 (2022). https://doi.org/10.1007/s00542-019-04573-2
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DOI: https://doi.org/10.1007/s00542-019-04573-2