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Model and experiment of scale factor acceleration sensitivity of MEMS gyroscope in high acceleration environment

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Abstract

With the development of MEMS gyroscope, acceleration sensitivity is becoming an important factor in application. The acceleration sensitivity would produce an obvious output error, and researchers mainly focus on bias acceleration sensitivity. Yet, in environment of high acceleration and angular rate, it is the scale factor acceleration sensitivity that influences the output most, and there is little research on it. In this paper, scale factor acceleration sensitivity of MEMS gyroscope in high acceleration environment is investigated with our established theoretical model and experimental measurement. Based on our proposed method of measuring the acceleration sensitivity in environment of high acceleration and angular rate, the MEMS tuning fork gyroscope is used for the measurement. The results show that the output error caused by acceleration can be up to − 30.1°/s and the scale factor acceleration sensitivity contributes the most. The coefficient of scale factor acceleration sensitivity is 35 ppm/g under 50g acceleration, and this coefficient increases linearly with acceleration that coincides with theoretical model. Lastly, some suggestions of decreasing scale factor acceleration sensitivity are given. This work is useful for the researchers to improve the performance of acceleration sensitivity of MEMS gyroscope.

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Acknowledgements

This research was supported by Generality Research Foundation of Component of China (Grant no. JAD1628200).

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Authors and Affiliations

  1. Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No. 5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou, Guangdong, China

    Xianshan Dong, Qinwen Huang, ShaoHua Yang, Yun Huang & Yunfei En

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  1. Xianshan Dong
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  2. Qinwen Huang
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  3. ShaoHua Yang
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Correspondence to Qinwen Huang.

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Dong, X., Huang, Q., Yang, S. et al. Model and experiment of scale factor acceleration sensitivity of MEMS gyroscope in high acceleration environment. Microsyst Technol 25, 3097–3103 (2019). https://doi.org/10.1007/s00542-018-4211-9

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  • DOI: https://doi.org/10.1007/s00542-018-4211-9

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