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Preparation of hollow out-of-plane hafnium oxide microneedle arrays for transdermal drug delivery

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Abstract

Due to the incapacity of many drugs to enter the skin at therapeutically useful rates, transdermal drug delivery with the advantages of controlled release, high safety and low degree of side effects is seriously hampered in efficiency and success. A microneedle approach can dramatically promote transdermal delivery, especially for macromolecules. In this paper, a fabrication process for hollow out-of-plane hafnium oxide microneedles on silicon wafer using only one mask has been developed. Photoresist is spun on a 4″ silicon (100) wafer and patterned by a mask. Deep reactive ion etching is used to form deep molds inside the wafer. A hafnium oxide film is deposited by atomic layer deposition to cover the top side of the wafer and the inside walls of the molds. Then the back side of silicon wafer is etched under the condition of 30 wt% KOH solution and a water-bath temperature of 81 °C until exposed hollow hafnium oxide microneedles are obtained. Compared to the processes that have been developed for silicon, silicon oxide, or polymer microneedles, the process presented here is simpler, and the strength and flexibility of hollow hafnium oxide microneedles can be easily adjusted by modifying the depositing time of hafnium oxide films. Hafnium oxide microneedles have potential applications in transdermal drug delivery.

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References

  • Aoyagi S, Izumi H, Isono Y, Fukuda M, Ogawa H (2007) Laser fabrication of high aspect ratio thin holes on biodegradable polymer and its application to a microneedle. Sens Actuators A 139(1–2):293–302

    Article  Google Scholar 

  • Bai Q, Wise KD (2001) Single-unit neural recording with active microelectrode arrays. IEEE Trans Biomed Eng 48(8):911–920

    Article  Google Scholar 

  • Elias PM, Feingold KP (2001) Coordinate regulation of epidermal differentiation and barrier homeostasis. Skin Pharmacol Appl Skin Physiol 14(Suppl. 1):28–34

    Article  Google Scholar 

  • French PJ, Gennissen TPJ, Sarro PM (1997) New silicon micromachining techniques for microsystems. Sens Actuators A 62(1–3):652–662

    Article  Google Scholar 

  • Frick TB, Marucci DD, Cartmill JA, Martin CJ, Walsh WR (2001) Risistance forces acting on suture needles. J Biomech 34(10):1335–1340

    Article  Google Scholar 

  • Gere JM, Timoshenko SP (1984) Mechanics of materials. CBS Publishers, New Delhi

    Google Scholar 

  • Gill HG, Prausnitz MR (2007) Coated microneedles for transdrmal delivery. J Control Release 117(2):227–237

    Article  Google Scholar 

  • Giri Nandagopal MS, Antony R, Rangabhashiyam S, Sreekumar N, Selvaraju N (2014) Overview of microneedle system: a third generation transdermal drug delivery approach. Microsyst Technol 20(7):1249–1272

    Article  Google Scholar 

  • Hamilton JG (1995) Needle phobia: a neglected diagnosis. J Fam Pract 42(1):169–175

    Google Scholar 

  • Henry S, McAllister DV, Allen MG, Prausniz MR (1998) Microfabricated microneedles: a new approach to transdermal drug deliver. J Pharm Sci 87(8):922–925

    Article  Google Scholar 

  • Huang H, Fu C (2007) Different fabrication methods of out-of-plane polymer hollow needle arrays and their variations. J Micromech Microeng 17(2):393–402

    Article  Google Scholar 

  • Jurcicek P, Zou H, Zhang S, Liu C (2013) Design and fabrication of hollow out-of-plane silicon microneedles. Micro Nano Lett 8(2):78–81

    Article  Google Scholar 

  • Kim K, Lee JB (2007) High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector. Microsist Technol 13(3–4):231–235

    Google Scholar 

  • Lhernould MS (2013) Optimizing hollow microneedles arrays aimed at transdermal drug delivery. Microsist Technol 19(1):1–8

    Article  Google Scholar 

  • Matteucci M, Fanetti M, Casella M, Gramatica F, Gavioli L, Tormen M, Grenci G, Angelis FD, Di Fabrizio E (2009) Poly vinyl alcohol re-usable masters for microneedle replication. Microelectron Eng 86(4–6):752–756

    Article  Google Scholar 

  • Park J-H, Allen MG, Prausnitz MR (2006) Polymer microneedles for controlled-release drug delivery. Pharm Res 23(3):1008–1019

    Article  Google Scholar 

  • Parker ER, Rao MP, Turner KL, Meinhart CD, MacDonald NC (2007) Bulk micromachined titanium microneedles. J Microelectromech Syst 16(2):289–295

    Article  Google Scholar 

  • Prausnitz MR, Mitragotri S, Langer R (2004) Current status and future potential of transdermal drug deleivery. Nat Rev Drug Discov 3(2):115–124

    Article  Google Scholar 

  • Rajaraman S, Henderson HT (2005) A unique fabrication approach for microneedles using coherent porous silicon tchnology. Sens Actuators B 105(2):443–448

    Article  Google Scholar 

  • Stoeber B, Liepmann D (2005) Arrays of hollow out-of-plane microneedles for drug delivery. J Microelectromech Syst 14(3):472–479

    Article  Google Scholar 

  • Tanaka H, Yamashita S, Abe Y, Shikida M, Sato K (2004) Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution. Sens Actuators A 114(2–3):516–520

    Article  Google Scholar 

  • Vinayakumar KB, Rajanna K, Dinesh NS (2016) Out-of-plane cup shaped stainless steel microneedle array for drug delivery. IEEE Annu Int Conf Nano/Micro Eng Mol Syst, NEMS 2016, Sendai, Japan, pp 172–175

  • Wang Y, Ho M-T, Goncharova LV, Weilunski LS, Rivillon-Amy S, Chabal YJ, Gustafsson T (2007) Characterizaion of ultra-thin hafnium oxide films grown on silicon by atomic layer deposition using tetrakis(ethylmethyl-amino) hafnium and water precursors. Chem Mater 19(13):3127–3138

    Article  Google Scholar 

  • Zhu J, Shen Q, Cao Y, Chen X, Zhao X (2016) The fabrication and property of a novel coated out-of-plane microneedle arrays. Microsyst Technol 22(1):143–149

    Article  Google Scholar 

  • Zubel I, Kramkowska M (2002) The effect of alcohol additives on etching characteristics in KOH solutions. Sens Actuators A 101(3):255–261

    Article  Google Scholar 

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Acknowledgements

The authors would like to thank Tony Whipple, Mark Fisher, Paul Kimani and other members of the Minnesota Nano Center at the University of Minnesota for their advice and help. Funding was provided by State Scholarship Fund of China and the open research fund of Shanghai key Laboratory of Miltidimensional Information Processing, East China Normal University (Grant Nos. 201306145016 and 40500-542500-15202/007/002)

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Authors and Affiliations

  1. Department of Electronic Science and Engineering, East China Normal University, 200241, Shanghai, China

    Yong-hua Zhang

  2. Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, 55455, USA

    Stephen A. Campbell

  3. Department of Physics and Nanotechnology, SRM University, Kattankulathur, Chennai, Tamil Nadu, 603203, India

    Sreejith Karthikeyan

Authors
  1. Yong-hua Zhang
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  2. Stephen A. Campbell
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  3. Sreejith Karthikeyan
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Corresponding author

Correspondence to Yong-hua Zhang.

Additional information

This work is supported by the State Scholarship Fund of China, and the open research fund of Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University, China.

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Zhang, Yh., Campbell, S.A. & Karthikeyan, S. Preparation of hollow out-of-plane hafnium oxide microneedle arrays for transdermal drug delivery. Microsyst Technol 23, 5887–5892 (2017). https://doi.org/10.1007/s00542-017-3354-4

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  • DOI: https://doi.org/10.1007/s00542-017-3354-4

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