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Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method

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Abstract

The profile of the nano-mold can also influence the replication precision of the final 2D polymer nanochannels. In the present work, the aspect ratio of the nano-mold, the duty ratio of the nano-mold, and the thickness ratio were investigated by numerical simulation method. The replication precision of the 2D polymer nanochannels is evaluated by imprinting ratio. The simulation results show that the lower aspect ratio and duty ratio is associated with higher imprinting ratio. However, the imprinting ratio increases with the thickness ratio at beginning and then keeps nearly unchanged as the thickness ratio continuously increases. The proper thickness ratio is two. The imprinting temperature and pressure were also optimized according the imprinting ratio. The simulation results show that the optimal imprinting temperature and pressure were 120 °C and 1.5 MPa, respectively.

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Acknowledgments

This project is supported by National Natural Science Foundation of China (No. 91023046, No. 51075059) and Specialized Research Fund for the Doctoral Program of Higher Education of China (SRFDP) (No. 20120041110034).

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Authors and Affiliations

  1. Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, 116024, Dalian, China

    Zhifu Yin, Lei Sun, Helin Zou & Shenbo Xu

  2. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, 116024, Dalian, China

    Helin Zou

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  1. Zhifu Yin
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  2. Lei Sun
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  3. Helin Zou
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  4. Shenbo Xu
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Correspondence to Helin Zou.

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Yin, Z., Sun, L., Zou, H. et al. Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method. Microsyst Technol 22, 1105–1113 (2016). https://doi.org/10.1007/s00542-015-2564-x

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  • DOI: https://doi.org/10.1007/s00542-015-2564-x

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