Abstract
Microleverage mechanism which is widely applied in microelectromechanical systems (MEMS) transfers and amplifies force or displacement from input to output. In this work, one-stage microleverage mechanism is integrated into a biaxial micro resonant accelerometer to improve sensitivity. Force amplification factor of the microleverage is analyzed and deduced by integral method. The results from theoretical model match well with the ones from finite element method (FEM) simulation, which proves that the proposed model is relatively accurate and the width of lever beam is a quite important parameter in design. The resonant accelerometer is successfully fabricated by MEMS technology. Preliminary experiments are conducted and demonstrate differential sensitivity of 71 Hz/g for the accelerometer with resonant frequency of 267.726 kHz.
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Acknowledgments
This work is supported by the “National Natural Science Foundation of China (No. 51475423)”, the “Zhejiang Provincial Natural Science Foundation of China (No. LY14E050018)” and the “Science Fund for Creative Research Groups of National Natural Science Foundation of China (No. 51221004)”.
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Ding, H., Zhao, J., Ju, BF. et al. A new analytical model of single-stage microleverage mechanism in resonant accelerometer. Microsyst Technol 22, 757–766 (2016). https://doi.org/10.1007/s00542-015-2528-1
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DOI: https://doi.org/10.1007/s00542-015-2528-1