Abstract
A central symmetrical design in double ended tuning fork (DETF) resonator is demonstrated to remove the high feedthrough signal. The equivalent electrical simulation model for piezoresistive sensing is first built to illustrate that the location arrangement of connection pads plays a decisive role in the response of the high frequency resonators. Both of the symmetrical design and asymmetrical design of the DETF that resonating at 3.1 MHz are fabricated and tested to verifiy that with the same dimension of the resonator structrue, the symmetrical design can help to cancel the feedthrough signal from the output of the wheastone bridge.
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Acknowledgements
The authors acknowledge the support of this research by the National High Technology Research and Development Program of China (project 2013AA041106) and Shanghai Municipal Science and Technology Commission (project 13dz1100300).
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Wei, W., You, W., Dou, C. et al. Symmetrical design in piezoresistive sensing for micromechanical resonator. Microsyst Technol 22, 811–816 (2016). https://doi.org/10.1007/s00542-015-2461-3
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DOI: https://doi.org/10.1007/s00542-015-2461-3