Abstract
A novel kind of RF MEMS square resonator with a movable electrode structure that is driven by electrostatic force is proposed. Within the scope of the fabrication process allowed, the gap between the movable electrode and resonance square is decreased from 2.5 to 0.5 μm, which greatly reduces motional resistance so that resonator is easier to resonate. Then the DC driving voltage that makes electrode move setting displacement is deduced theoretically. The finite element simulation and analysis software ANSYS are used to validate mechanical vibration modal and determine center frequency of resonator. In addition, simulation of harmonic analysis is applied to obtain the change of output current and motional resistance before and after the electrode moving. Moreover, the design can also, to a certain extent, ease the difficulty of manufacturing the small gap in the micro-processing technology.
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Acknowledgments
This work was supported by the National Natural Science Foundation of China and the China Academy of Engineering Physics (11176006), the Foundation of China (Grant No.9140A23060409DZ02) and Chinese Academy of Engineering Physics Science and Technology Development Foundation (Grant No. 2008A0403016).
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Wang, Q.P., Bao, J.F., Ling, Y. et al. Design of a novel RF MEMS square resonator. Microsyst Technol 21, 1805–1810 (2015). https://doi.org/10.1007/s00542-014-2295-4
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DOI: https://doi.org/10.1007/s00542-014-2295-4