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Selective modal excitation in coupled piezoelectric microcantilevers

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Abstract

We study in detail the first vibration modes of a piezoelectric resonator based on two coupled micro-cantilevers, also known as tuning-forks. A multiple electrode geometry lying on a layer of piezoelectric AlN allows the selective excitation of different modes, including in-plane modes. A complete optical characterization of the devices in the z- and also the x-direction has been performed employing a Doppler vibrometer. The measurements confirm the excitation and inhibition of different modes depending on the actuation signals distribution on the electrodes. The influence of the dimensions of the resonator on the coupling between the microcantilevers has also been studied. Quality factors above 4,300 have been measured for the first anti-phase in-plane mode.

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Acknowledgments

This work has been supported by Junta de Comunidades de Castilla-La Mancha project no PEIC11-0022-7430. MICINN (Spain) supported by project contract DPI2009-07497, a FPI Grant (Ref. BES-2010-030770) awarded to Tomás Manzaneque and a Juan de la Cierva research contract awarded to Marta Gil (JCI-2009-04502). The authors would also like to thank Dr. Erwin Peiner (Technical University of Braunschweig) for the support during device fabrication.

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Authors and Affiliations

  1. Dpto. de Ingeniería Eléctrica, Electrónica, Automática y Comunicaciones, ETSI Industriales, Campus Universitario, 13071, Ciudad Real, Spain

    M. Gil, T. Manzaneque, J. Hernando-García & J. L. Sánchez-Rojas

  2. Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, Irbid, Jordan

    A. Ababneh

  3. Micromechanics, Microfluidics and Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbrücken, Germany

    H. Seidel

Authors
  1. M. Gil
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  2. T. Manzaneque
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  3. J. Hernando-García
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  4. A. Ababneh
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  5. H. Seidel
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  6. J. L. Sánchez-Rojas
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Correspondence to M. Gil.

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Gil, M., Manzaneque, T., Hernando-García, J. et al. Selective modal excitation in coupled piezoelectric microcantilevers. Microsyst Technol 18, 917–924 (2012). https://doi.org/10.1007/s00542-011-1411-y

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  • DOI: https://doi.org/10.1007/s00542-011-1411-y

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