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Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

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Abstract

Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which is integrated with a modified disturbance estimating observer (MDEO) is proposed to guarantee the resonant oscillations at drive mode and counterbalance the undesired disturbance caused by quadrature error and cross-axis perturbation. The parameters of controller are on-line innovated by the dynamic error between the MDEO output and expected response. In addition, Lyapunov stability theory is employed to examine the stability of the closed-loop control system. At last, the efficacy of evaluation of the exerted time-varying angular rate, which is to be detected and measured by the gyroscope, is verified by intensive simulations.

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Acknowledgments

The authors would like to thank the Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan, and National Nano Devices Laboratory (NDL) for equipment access and technical support. This research was partially supported by National Science Council (Taiwan) with Grant NSC99-2622-E-006-010-CC2.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan

    Nan-Chyuan Tsai & Chung-Yang Sue

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  1. Nan-Chyuan Tsai
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  2. Chung-Yang Sue
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Correspondence to Nan-Chyuan Tsai.

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Tsai, NC., Sue, CY. Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator. Microsyst Technol 15, 1803–1814 (2009). https://doi.org/10.1007/s00542-009-0925-z

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  • DOI: https://doi.org/10.1007/s00542-009-0925-z

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