Abstract
This study designs, fabricates, and characterizes a novel micro electromagnetic actuator comprising a PDMS diaphragm, a polyimide-coated copper micro coil, and a permanent magnet. When an electrical current is passed through the micro coil, a magnetic force is induced between the coil and the magnet which causes the diaphragm to deflect, thereby creating an actuation effect. The experimental results demonstrate that the diaphragm deflection can be accurately controlled by regulating the current passed through the micro coil. It is shown that the maximum diaphragm deflection within elastic limits is 150 μm; obtained by passing a current of 0.6 A through a micro coil with a line width of 100 μm. The micro actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
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References
Chang HT, Lee CY, Wen CY (2007) Design and modeling of electromagnetic actuator in mems-based valveless impedance pump. Microsyst Technol 13:1615–1622. doi:10.1007/s00542-006-0332-7
Chen SC, Cheng CH, Lin YC (2007) Fabrication of components for a valve-less micropump of microejector by multilevel electroforming technology. Microsyst Technol 13:455–463. doi:10.1007/s00542-006-0209-9
Feldmann M, Weldschil A, Ruffert C, Gatzen HH, Büttgenbach S (2008) Fabrication of drive and guide components for micro motors. Microsyst Technol 14. doi:10.1007/s00542-008-0619-y
Lagorce LK, Brand O, Allen MG (1999) Magnetic microactuators based on polymer magnets. IEEE J MEMS 8(1):2–9
Lee CY, Chang HT, Wen CY (2008) A MEMS-based valveless impedance pump utilizing electromagnetic actuation. J Micromech Microeng 18:1–9
Liu C, Tsao T, Tai YC, Ho CM (1994) Surface micromachined magnetic actuators. Proc IEEE MEMS 1994:57–62
Ma HK, Hou BR, Wu HY, Lin CY, Gao JJ, Kou MC (2008) Development and application of a diaphragm micro-pump with piezoelectric device. Microsyst Technol 14:1001–1007. doi:10.1007/s00542-007-0462-6
Mochizuki H, Mekaru H, Kusumi S, Sato N, Shimizu M, Yamashita M, Shimada O, Hattori T (2007) Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metallization. Microsyst Technol 13:547–550. doi:10.1007/s00542-006-0230-z
Neda U, Nakmura K, Takumi T (1996) A polysilicon flow sensor for gas flow meters. Sensors Actuators A 54:626–631. doi:10.1016/S0924-4247(97)80027-1
Pan CT, Yang H, Chou MC, Shen SC (2005) Integrated electromagnetic microactuators with a large driving force. Microsyst Technol 12:173–179. doi:10.1007/s00542-005-0013-y
Ruffert C, Feldmann M, Buettgenbach S, Gatzen HH (2006) Fabrication of functional components for electromagnetic microactuators. Microsyst Technol 12:670–675. doi:10.1007/s00542-006-0091-5
Solf C, Janssen A, Mohr J, Ruzzu A, Wallrabe U (2004) Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer. Microsyst Technol 10:706–710. doi:10.1007/s00542-004-0406-3
Xu H, Ono T, Zhang DY, Esashi M (2006) Fabrication and characterizations of a monolithic PZT microstage. Microsyst Technol 12:883–890. doi:10.1007/s00542-006-0206-z
Yamahata C, Lotto C, Al-Assaf E, Gijs MAM (2005) A PMMA valveless micropump using electromagnetic actuation. Microfluid Nanofluid 1:197–207. doi:10.1007/s10404-004-0007-6
Yanagisawa K, Kuwano H, Tago A (1995) Electromagnetically driven microvalve. Microsyst Technol 2:22–25. doi:10.1007/BF02739524
Zhu H, Miao J, Chen B, Wang Z, Zhu W (2005) Membrane microcantilever arrays fabrication with PZT thin films for nanorange movement. Microsyst Technol 11:1121–1126. doi:10.1007/s00542-005-0512-x
Acknowledgments
The authors would like to thank the financial support provided by the National Science Council in Taiwan (NSC 97-2221-E-020-038, NSC 97-2218-E-006-012, and NSC 96-2218-E-006-004).
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Lee, CY., Chen, ZH., Chang, HT. et al. Design and fabrication of novel micro electromagnetic actuator. Microsyst Technol 15, 1171–1177 (2009). https://doi.org/10.1007/s00542-008-0734-9
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DOI: https://doi.org/10.1007/s00542-008-0734-9