Skip to main content
SpringerLink
Log in

Normal-incidence pulsed-laser deposition: better method for fabrication of multilayer structures

  • Rapid communication
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

A new normal-incidence pulsed-laser deposition method is presented. Fe/Mn multilayers were fabricated using both 45°- and normal-incidence deposition of a pulsed laser and were characterized using the small-angle X-ray reflectivity measurement. This new method provides much better control of the lateral uniformity and layer thickness than the 45°-incidence deposition method.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Author information

Authors and Affiliations

  1. Department of Physics, Pohang University of Science and Technology, 790-784 Pohang, Korea (Fax: +82-562/279-3099, E-mail: injoon@anyon.postech.ac.kr), , , , , , KR

    I.J. Jeon, D. Kim, J.S. Song, J.H. Her, D.R. Lee & K.-B. Lee

Authors
  1. I.J. Jeon
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. D. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J.S. Song
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J.H. Her
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D.R. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. K.-B. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 23 September 1999 / Accepted: 5 October 1999 / Published online: 21 January 2000

Rights and permissions

Reprints and permissions

About this article

Cite this article

Jeon, I., Kim, D., Song, J. et al. Normal-incidence pulsed-laser deposition: better method for fabrication of multilayer structures . Appl Phys A 70, 235–238 (2000). https://doi.org/10.1007/s003390050040

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003390050040

Search

Navigation