Abstract
Amorphous zinc–magnesium–tin oxide (a-ZMTO), a new kind of amorphous oxide semiconductors (AOSs), was prepared for fabricating thin-film transistors (TFTs) by a combustion solution process. The prepared ZnMgSnO films have a high amorphous quality with smooth surface, evenly distributed elements, as well as high visible transmittance above 80% with a width of band gap of around 3.12 eV. The effects of Mg content on properties of films and performance of devices were investigated in detail. An appropriate Mg content could efficiently suppress the oxygen vacancy (VO) concentration and make the surface smoother, thereby enhancing the properties of films and performance of related a-ZMTO TFTs. The a-ZMTO TFTs exhibited acceptable performances, with field-effect mobility (μFE) of 0.083 cm2 V−1 S−1, on/off current ratio (Ion/Ioff) of around 3.0 × 104, and threshold voltage (Vth) of 1.42 V. The a-ZMTO films and ZMTO TFTs may offer an option of indium-free AOS materials for future application in transparent electronics.
Similar content being viewed by others
References
K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature 432, 488 (2004)
Q. Jiang, L. Feng, C. Wu, R. Sun, X. Li, B. Lu, Z. Ye, J. Lu, Appl. Phys. Lett. 106, 053503 (2015)
Y.G. Kim, C. Avis, H.R. Hwang, T.W. Kim, Y.G. Seol, J. Jang, J. Display Technol. 10, 939 (2014)
J. Wang, Y. Li, C. Yin, Y. Yang, T.-L. Ren, IEEE Electron Device Lett. 38, 191 (2017)
B. Lu, Y. Lu, H. Zhu, J. Zhang, S. Yue, S. Li, F. Zhuge, Z. Ye, J. Lu, Mater. Lett. 249, 169 (2019)
Q.J. Jiang, C.J. Wu, J.P. Cheng, X.D. Li, B. Lu, Z.Z. Ye, J.G. Lu, RSC Adv. 5, 28242 (2015)
T. Kamiya, K. Nomura, H. Hosono, Sci Technol Mater. 11, 044305 (2010)
E.M.C. Fortunato, L.M.N. Pereira, P.M.C. Barquinha, A.M.B. Rego, G. Goncalves, A. Vilà, J.R. Morante, R.F.P. Martins, Appl. Phys. Lett. 92, 222103 (2008)
Y.S. Rim, D.L. Kim, W.H. Jeong, H.J. Kim, Appl. Phys. Lett. 97, 233502 (2010)
C.-X. Huang, J. Li, C.-Y. Zhao, Y.-Z. Fu, J.-H. Zhang, X.-Y. Jiang, Z.-L. Zhang, IEEE Trans. Electron Devices 63, 4320 (2016)
B.D. Pelatt, R. Ravichandran, J.F. Wager, D.A. Keszler, J. Am. Chem. Soc. 133, 16852 (2011)
J.F. Wager, B. Yeh, R.L. Hoffman, D.A. Keszler, Curr. Opin. Solid State Mater. Sci. 18, 53 (2014)
D.-H. Cho, S. Yang, C. Byun, J. Shin, M.K. Ryu, S.-H.K. Park, C.-S. Hwang, S.M. Chung, W.-S. Cheong, S.M. Yoon, H.-Y. Chu, Appl. Phys. Lett. 93, 142111 (2008)
S.J. Kim, S.C. Yoon, H.J. Kim, Jpn. J. Appl. Phys. Part 1. 53, 02BA02 (2014)
J.G. Lu, Z.Z. Ye, J.Y. Huang, L. Wang, B.H. Zhao, Appl. Surf. Sci. 207, 295 (2003)
C.J. Wu, X.F. Li, J.G. Lu, Z.Z. Ye, J. Zhang, T.T. Zhou, R.J. Sun, L.X. Chen, B. Lu, X.H. Pan, Appl. Phys. Lett. 103, 082109 (2013)
C. Terrier, J.P. Chatelon, R. Berjoan, J.A. Roger, Thin Solid Films 263, 37 (1995)
S. Yue, J. Lu, R. Lu, S. Li, X. Li, J. Zhang, L. Chen, Z. Ye, Appl. Phys. Lett. 113, 013504 (2018)
P. Juan, C. Liu, C. Lin, S. Ju, M. Chen, I.Y. Chang, J. Lu, Jpn. J. Appl. Phys. 48, 05DA02 (2009)
Acknowledgements
This work was supported by National Key Research and Development Program of China under Grant No. 2017YFB0404703.
Author information
Authors and Affiliations
Corresponding authors
Ethics declarations
Conflict of interest
The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Lu, B., Cheng, X., Liu, R. et al. Effect of Mg content on characteristics of amorphous ZnMgSnO thin-film transistors by a combustion solution process. Appl. Phys. A 126, 865 (2020). https://doi.org/10.1007/s00339-020-04042-y
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00339-020-04042-y