Abstract
In this study, a remarkable spatial shaping approach is proposed to transform Gaussian femtosecond laser into quasi-Bessel optical field with compressed central lobe and amplified side lobes of the spatial intensity profile. Based on this technique, inward bulge trench (IBT) structures are fabricated with high efficiency on the surface of PMMA by a single illumination step, whose cross-sectional profile is opposite to the results fabricated by Gaussian beam. And plano-convex cylindrical microlens array, which is consistent in size and shape throughout a large sample area, is formed through simply piecing together the IBT structures during fabricating process. Furthermore, numerical simulations of optical field in radial direction and on-axial direction are exploited to rationalize the dependence of the patterned microstructures on the spatial intensity distribution of femtosecond laser.
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Acknowledgments
This research is supported by the National Basic Research Program of China (973 Program) (Grant No. 2011CB013000), National Natural Science Foundation of China (NSFC) (Grant Nos. 91323301 and 51505505), China Postdoctoral Science Foundation (Grant No. 2015M572264), Self-selected Topic Fund of State Key Laboratory of High Performance Complex Manufacturing (Grant No. ZZYJKT2015-08), and Hunan Provincial Innovation Foundation for Postgraduate (Grant No. CX2015B044).
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Luo, Z., Wang, C., Yin, K. et al. Rapid fabrication of cylindrical microlens array by shaped femtosecond laser direct writing. Appl. Phys. A 122, 633 (2016). https://doi.org/10.1007/s00339-016-0172-y
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DOI: https://doi.org/10.1007/s00339-016-0172-y