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Synthesis of periodic plasmonic microstructures with copper nanoparticles in silica glass by low-energy ion implantation

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Abstract

Ion implantation was used to locally modify the surface of silica glass to create periodic plasmonic microstructures with Cu nanoparticles. Nanoparticles were synthesized by Cu-ion irradiation of the silica glass at the ion energy of 40 keV, dose of 5×1016 ions/cm2 and current density of 5 μA/cm2. This procedure involves low-energy ion implantation into the glass through a mask placed at the surface. Formation of nanoparticles was observed by optical spectroscopy and atomic force microscopy. The presented results clearly demonstrate how the low-energy ions can be used for the fabrication of photonic microstructures on dielectric surfaces in a single-step process.

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Acknowledgements

A.L.S. grateful to the Alexander von Humboldt Foundation and the DAAD (Germany). Also, this work was partly supported by the Russian Foundation for Basic Research (Nos. 11-02-91341, 11-02-90420, 12-02-97029 and 12-02-00528) and DFG (Germany) (No. CH 179/22-1). T.S.K. was supported by the State Fund for Fundamental Researches of Ukraine (No. 40.2/019). We would like to thank Dr. V.N. Popok from Aalborg University for the help with AFM measurements.

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Authors and Affiliations

  1. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany

    A. L. Stepanov, A. B. Evlyukhin, R. Kiyan & B. N. Chichkov

  2. Kazan Physical-Technical Institute of RAS, Sibirsky Trakt 10/7, 420029, Kazan, Russia

    A. L. Stepanov, M. F. Galyautdinov, V. I. Nuzhdin & V. F. Valeev

  3. Kazan Federal University, Kremlivskaya 18, 420008, Kazan, Russia

    A. L. Stepanov & Y. N. Osin

  4. Kama State Academy of Engineering and Economics, 423810, Naberezhnye Chelny, Russia

    A. B. Evlyukhin

  5. Institut Galilee, Universite Paris 13, 93430, Villetaneuse, France

    E. A. Evlyukhin

  6. Drohobych Ivan Franko State Pedagogical University, I. Franko 24, 82100, Drohobych, Ukraine

    T. S. Kavetskyy

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  1. A. L. Stepanov
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  2. M. F. Galyautdinov
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  3. A. B. Evlyukhin
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  4. V. I. Nuzhdin
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  5. V. F. Valeev
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  7. E. A. Evlyukhin
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  8. R. Kiyan
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  9. T. S. Kavetskyy
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  10. B. N. Chichkov
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Correspondence to A. L. Stepanov.

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Stepanov, A.L., Galyautdinov, M.F., Evlyukhin, A.B. et al. Synthesis of periodic plasmonic microstructures with copper nanoparticles in silica glass by low-energy ion implantation. Appl. Phys. A 111, 261–264 (2013). https://doi.org/10.1007/s00339-012-7474-5

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  • DOI: https://doi.org/10.1007/s00339-012-7474-5

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