Skip to main content
SpringerLink
Log in

Comparison of bismuth emitting liquid metal ion sources

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Four different liquid metal ion sources (LMIS), working with pure Bi as well as with Bi containing alloys (Au13Bi87, Ga38Bi62, Ga35Bi60Li5) were investigated with respect to the emission behavior as a function of current and temperature, the mass spectra and the energy distribution of the individual ion species. Additionally, for the pure Bi-LMIS the sputtering rates for Bi ions and clusters on Si, SiO2 and Ge substrates were compared with that of Ga projectile ions using a mass separating focused ion beam system.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. Orloff, M. Utlaut, L. Swanson, High Resolution Focused Ion Beams (Kluwer Academic/Plenum, New York, 2003)

    Google Scholar 

  2. V.N. Tondare, J. Vac. Sci. Technol. A 23, 1498 (2005)

    Article  ADS  Google Scholar 

  3. L.W. Swanson, Nucl. Instrum. Methods Phys. Res. 218, 347 (1983)

    Article  ADS  Google Scholar 

  4. P. Mazarov, A. Melnikov, R. Wernhardt, A.D. Wieck, Appl. Surf. Sci. 254, 7401 (2008)

    Article  ADS  Google Scholar 

  5. L. Bischoff, W. Pilz, T. Ganetsos, R.G. Forbes, Ch. Akhmadaliev, Ultramicroscopy 107, 865 (2007)

    Article  Google Scholar 

  6. L. Bischoff, Ch. Akhmadaliev, J. Phys., D Appl. Phys. 41, 052001 (2008)

    Article  ADS  Google Scholar 

  7. W.P. Hsieh, B.L. Sheu, Y.L. Wang, Appl. Phys. Lett. 83, 2277 (2003)

    Article  ADS  Google Scholar 

  8. F.M. Green, F. Kollmer, E. Niehuis, I.S. Gilmore, M.P. Seah, Rapid Commun. Mass Spectrom. 22, 2602 (2008)

    Article  Google Scholar 

  9. F. Kollmer, Appl. Surf. Sci. 231/232, 153 (2004)

    Article  ADS  Google Scholar 

  10. A. Wagner, T.M. Hall, J. Vac. Sci. Technol. 16, 1871 (1979)

    Article  ADS  Google Scholar 

  11. S. Bouneau, S. Della-Negra, J. Jacquet, Y. LeBeyec, J.P. Mouffron, A. Novikov, M. Pautrat, Nucl. Instrum. Methods Phys. Res. B 225, 579 (2004)

    Article  ADS  Google Scholar 

  12. L. Bischoff, J. Teichert, S. Hausmann, T. Ganetsos, G.L.R. Mair, Nucl. Instrum. Methods Phys. Res. B 161–163, 1128 (2000)

    Article  Google Scholar 

  13. P.D. Prewett, G.L.R. Mair, Focused Ion Beams from Liquid Metal Ion Sources (Research Studies Press Ltd., Taunton, Somerset, 1991)

    Google Scholar 

  14. D.R. Kingham, L.W. Swanson, Appl. Phys. A 34, 123 (1984)

    Article  ADS  Google Scholar 

  15. L.W. Swanson, Appl. Surf. Sci. 76/77, 80 (1994)

    Article  ADS  Google Scholar 

  16. E.W. Mueller, J. Appl. Phys. 27, 474 (1956)

    Article  ADS  Google Scholar 

  17. D.G. Brandon, Surf. Sci. 3, 1 (1964)

    Article  ADS  Google Scholar 

  18. L.W. Swanson, D.R. Kingham, Appl. Phys. A 41, 223 (1986)

    Article  ADS  Google Scholar 

  19. R. Hornsey, T. Ishitani, Jpn. J. Appl. Phys. 29, 2116 (1990)

    Article  ADS  Google Scholar 

  20. J. Van de Walle, P. Joyes, Phys. Rev. B 35, 5509 (1987)

    Article  ADS  Google Scholar 

  21. W. Knauer, Optik 59, 335 (1981)

    Google Scholar 

  22. Y.G. Kim, Y.S. Kim, E.H. Choi, S.O. Kang, G. Cho, H.S. Uhm, J. Phys., D Appl. Phys. 31, 3463 (1998)

    Article  ADS  Google Scholar 

  23. L.W. Swanson, G.A. Schwind, A.E. Bell, J.E. Brady, J. Vac. Sci. Technol. 16, 1864 (1979)

    Article  ADS  Google Scholar 

  24. T. Ishitani, K. Umemura, Y. Kawanami, J. Appl. Phys. 61, 748 (1987)

    Article  ADS  Google Scholar 

  25. P. Schneider, L. Bischoff, J. Teichert, E. Hesse, Nucl. Instrum. Methods Phys. Res. B 117, 77 (1996)

    Article  ADS  Google Scholar 

  26. S. Habenicht, K.P. Lieb, J. Koch, A.D. Wieck, Phys. Rev. B 65, 115327 (2002)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Forschungszentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, POB 51 01 19, 01314, Dresden, Germany

    L. Bischoff & W. Pilz

  2. Applied Solid State Physics, Ruhr-University Bochum, 44780, Bochum, Germany

    P. Mazarov & A. D. Wieck

  3. Konrad-Adenauer-Allee 8, Raith GmbH, 44263, Dortmund, Germany

    P. Mazarov

Authors
  1. L. Bischoff
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. W. Pilz
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. Mazarov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. D. Wieck
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to L. Bischoff.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bischoff, L., Pilz, W., Mazarov, P. et al. Comparison of bismuth emitting liquid metal ion sources. Appl. Phys. A 99, 145–150 (2010). https://doi.org/10.1007/s00339-010-5597-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-010-5597-0

Keywords

Search

Navigation