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Backscattering coefficients for low energy electrons and positrons impinging on metallic thin films: scaling study

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Abstract

Thin films Backscattering Coefficients (BSCs) for 1 to 4 keV electron and positron normally incident beams are stochastically modeled and calculated by the Monte Carlo method. We suggest a new function BSC(δ) depending only of one free parameter (to be determined) and which can describe very well the variation of the backscattering coefficient versus the film thickness (δ). Moreover, this paper aims at discussing the observed differences between the electron and positron properties impinging on solid targets.

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References

  1. M. Cherigui, N.E. Fenineche, G. Ji, T. Grosdidier, C. Coddet, J. Alloys Comp. 427, 281 (2007)

    Article  Google Scholar 

  2. R. Nouar, N. Fenineche, A. Billard, D. Mercs, C. Coddet, in European Congress and Exhibition on Advanced Materials and Processes, Nürnberg, Germany, 10–13 September 2007

  3. M. Cherigui, N.E. Fenineche, A. Gupta, C. Coddet, Surf. Coat. Technol. 201(3–4), 1805 (2006)

    Article  Google Scholar 

  4. R. Nouar, N. Fenineche, A. Billard, D. Mercs, C. Coddet, in Innovations on Thin Films Processing and Characterization (ITFPC07), Nancy, France, 20–23 November 2007

  5. R. Nouar, N. Fenineche, A. Billard, D. Mercs, C. Coddet, in 16th International Colloquium on PLASMA PROCESSES, Toulouse, France, 4–8 June 2007

  6. M. Cherigui, A. Hebbar, N.E. Fenineche, C. Coddet, J. Appl. Sci. 7(3), 386 (2007)

    Article  ADS  Google Scholar 

  7. K.G. Lynn, B.T.A. McKee, J. Appl. Phys. 19, 247 (1979)

    Article  ADS  Google Scholar 

  8. A.P. Mills Jr., Appl. Phys. Lett. 35, 427 (1979)

    Article  ADS  Google Scholar 

  9. P.J. Schultz, K.G. Lynn, Rev. Mod. Phys. 60, 701 (1988)

    Article  ADS  Google Scholar 

  10. K.O. Jensen, A.B. Walker, N. Bouarissa, AIP Conf. Proc. 218, 19 (1990)

    Article  ADS  Google Scholar 

  11. G.R. Massoumi, N. Hozhabri, K.O. Jensen, W.N. Lennard, M.S. Lorenzo, P.J. Schultz, A.B. Walker, Phys. Rev. Lett. 68, 3873 (1992)

    Article  ADS  Google Scholar 

  12. K.O. Jensen, A.B. Walker, Surf. Sci. 292, 83 (1993)

    Article  ADS  Google Scholar 

  13. G.C. Aers, Appl. Phys. Lett. 64, 661 (1994)

    Article  ADS  Google Scholar 

  14. M. Dapor, J. Appl. Phys. 77, 2840 (1995)

    Article  ADS  Google Scholar 

  15. N. Bouarissa, A.B. Walker, H. Aourag, J. Appl. Phys. 83, 3643 (1998)

    Article  ADS  Google Scholar 

  16. Z. Chaoui, N. Bouarissa, J. Appl. Phys. 96, 807 (2004)

    Article  ADS  Google Scholar 

  17. S. Valkealahati, R.M. Nieminen, Appl. Phys. A 32, 95 (1983)

    Article  ADS  Google Scholar 

  18. S. Valkealahati, R.M. Nieminen, Appl. Phys. A 35, 51 (1984)

    Article  ADS  Google Scholar 

  19. I. Adesida, R. Shimizu, T.E. Everhart, J. Appl. Phys. 51, 5962 (1980)

    Article  ADS  Google Scholar 

  20. K.A. Ritley, M. McKeown, K.G. Lynn, in Positr Boenams for Solid and Surfaces, ed. by P.J. Schultz, G. Massoumi, P.J. Simpson (AIP, New York, 1990), p. 3

    Google Scholar 

  21. B. Deghfel, N. Bouarissa, A. Bentabet, Phys. Stat. Sol. (b) 238(1), 136 (2003)

    Article  ADS  Google Scholar 

  22. N. Bouarissa, B. Deghfel, A. Bentabet, Eur. Phys. J. Appl. Phys. 19, 89 (2002)

    Article  ADS  Google Scholar 

  23. A. Bentabet, N. Bouarissa, Phys. Lett. A 355, 390 (2006)

    Article  ADS  Google Scholar 

  24. A. Bentabet, N. Bouarissa, Surf. Interface Anal. 39(5), 377 (2007)

    Article  Google Scholar 

  25. A. Bentabet, N. Bouarissa, Appl. Phys. A 88, 353 (2007)

    Article  ADS  Google Scholar 

  26. J. Mäkinen, S. Palko, J. Martikainen, P. Hautjarvi, J. Phys. Condens. Matter 4, L503 (1992)

    Article  Google Scholar 

  27. M. Gryzinski, Phys. Rev. A 138, 305 (1965)

    Article  ADS  MathSciNet  Google Scholar 

  28. M. Gryzinski, Phys. Rev. A 138, 322 (1965)

    ADS  MathSciNet  Google Scholar 

  29. M. Gryzinski, Phys. Rev. A 138, 336 (1965)

    Article  ADS  MathSciNet  Google Scholar 

  30. H. Lanteri, C. Richard, R. Bindi, P. Keller, Thin Solid Films 27, 301 (1975)

    Article  ADS  Google Scholar 

  31. H. Lanteri, R. Bindi, P. Rostaing, Thin Solid Films 88, 309 (1982)

    Article  ADS  Google Scholar 

  32. A. Aydin, Appl. Radiat. Isotopes 67(2), 281 (2009)

    Article  MathSciNet  Google Scholar 

  33. Z. Chaoui, N. Bouarissa, J. Phys. Condens. Matter 16, 799 (2004)

    Article  ADS  Google Scholar 

  34. M. Dapor, Phys. Rev. B 42(2), 618 (1992)

    Article  ADS  Google Scholar 

  35. M. Dapor, Eur. Phys. J. Appl. Phys. 18, 155 (2002)

    Article  ADS  Google Scholar 

  36. A. Bentabet, N. Bouarissa, Appl. Surf. Sci. 253, 8725 (2007)

    Article  ADS  Google Scholar 

  37. Z. Chaoui, N. Bouarissa, Appl. Surf. Sci. 221, 114 (2004)

    Article  ADS  Google Scholar 

  38. P.G. Coleman, L. Albrecht, K.O. Jensen, A.B. Walker, J. Phys. Condens. Matter 4, 10311 (1992)

    Article  ADS  Google Scholar 

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Bentabet, A., Fenineche, N.E. Backscattering coefficients for low energy electrons and positrons impinging on metallic thin films: scaling study. Appl. Phys. A 97, 425–430 (2009). https://doi.org/10.1007/s00339-009-5231-1

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