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Mixing effect on a nonequilibrium RF induction plasma

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Abstract

 An experimental study was conducted to clarify the effect of secondary gas mixing on the thermo-fluid characteristics of a nonequilibrium RF induction plasma. The premixed argon and helium gas was introduced into a reactor to produce a RF induction plasma in a low operating pressure. It is shown that there are large effects of helium gas injection location and guide length on the plasma luminous area, operating limit of stable plasma, concentration and temperature fields of a RF induction plasma. A visualization study was also conducted to correspond to the variation of plasma configurations by premixing with helium gas.

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Authors and Affiliations

  1. Institute of Fluid Science Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai, 980-8577, Japan, , , , , , JP

    H. Nishiyama, Takehiko Sato & Takeshi Sato

  2. Denso Corporation 2-1 Nagane, Sato-machi Anjo, Aichi, 446-0001, Japan, , , , , , JP

    S. Ito

  3. Department of Machine Intelligence and System Engineering Faculty of System Science and Engineering Akita Prefectural University 84-4, Ebinokuchi Tsuchiya, Honjo, Akita, 015-0055, Japan, , , , , , JP

    S. Kamiyama

Authors
  1. H. Nishiyama
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  2. Takehiko Sato
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  3. S. Ito
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  4. Takeshi Sato
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  5. S. Kamiyama
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Received on 26 March 2000

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Nishiyama, H., Sato, T., Ito, S. et al. Mixing effect on a nonequilibrium RF induction plasma. Heat and Mass Transfer 36, 433–437 (2000). https://doi.org/10.1007/s002310000102

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  • DOI: https://doi.org/10.1007/s002310000102

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