Abstract
Contamination in semiconductor industry is a very serious drawback during the production of integrated circuits. Connected with the ongoing miniaturization smaller and smaller amounts of metal contamination can effect the integrated circuits. Because of the outstanding detection limits ICP-MS is widely spread in semiconductor industry. The main applications are metal and semi-metal analysis in deionized water, chemicals and on the wafer surface. The challenges in semiconductor industry are the required detection limits, which are mainly limited by contamination during sample treatment and the background of the instruments.
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Received: 14 January 1999 / Revised: 12 April 1999 / Accepted: 12 April 1999
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Horn, M. Applications of ICP-MS in semiconductor industry. Fresenius J Anal Chem 364, 385–390 (1999). https://doi.org/10.1007/s002160051355
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DOI: https://doi.org/10.1007/s002160051355