Skip to main content

Advertisement

SpringerLink
Log in

Research on deformation mechanism and law of thin-walled flat parts in vacuum clamping

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Based on the theory of small deflection bending of a thin-walled part, a mechanical model of thin-walled planar members under the action of vacuum adsorption was established. Combined with finite-element simulation and testing, the deformation mechanism and law of the thin-walled flat members was studied under the action of vacuum adsorption. Vacuum clamping caused clamping residual stresses on the upper and lower surfaces of the thin-walled flat parts and resulted in torque along the middle surface. When the vacuum clamping was unloaded, the rebound of the thin-walled flat parts that was caused by the torque was the fundamental cause for the clamping deformation. The residual stress and deformation on the surface of the thin-walled flat parts tended to increase and level off with an increase in vacuum. From the initial stage to the stable clamping stage, the radial and tangential stresses in the 200 mm × 2.2 mm workpiece increased by –10 MPa and –27 MPa, respectively, and the relative displacement in the load direction increased by 0.026 mm. Under the effect of vacuum clamping, the maximum deformation capacity of thin-walled flat parts was affected mainly by their initial surface profile error. The stiffness of the workpiece was affected mainly by its thickness; a greater thickness led to a greater stiffness, and a larger vacuum was required for the workpiece to reach a stable clamping state.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

Data availability

All data generated or analyzed during this study are included in this published article.

References

  1. Wang LY, Huang HH, West RW, Li HJ, Du JT (2018) A model of deformation of thin-wall surface parts during milling machining process. J Cent South Univ 25(5):1107–1115. https://doi.org/10.1007/s11771-018-3810-z

    Article  Google Scholar 

  2. Sim WM (2010) Challenges of residual stress and part distortion in the civil airframe industry. Int J Microstruct Mater Prop 5(4–5):446–455. https://doi.org/10.1504/IJMMP.2010.037621

    Article  Google Scholar 

  3. Li BH, Deng HB, Hui D, Hu Z, Zhang WH (2020) A semi-analytical model for predicting the machining deformation of thin-walled parts considering machining-induced and blank initial residual stress. Int J Adv Manuf Technol 110(5):1–23. https://doi.org/10.1007/s00170-020-05862-1

    Article  Google Scholar 

  4. Fan ZQ, Cao LX, Liu F (2020) FEM analysis of the distortion of thin-walled sealing part affected by the machining-induced residual stress. (eds.) IOP Conference Series: Materials Science and Engineering 768(4):042028. https://doi.org/10.1088/1757-899X/768/4/042028

  5. Cao Y, Shi JL (2016) High speed milling of a large thin sheet copper part with a vacuum fixture on a CNC machine tool. (eds.) Proceedings of the 2nd Annual International Conference on Advanced Material Engineering (AME 2016) 1072–1076. https://doi.org/10.2991/ame-16.2016.173

  6. Ju K, Duan CZ, Kong JX, Chen Y, Sun YW, Wu SL (2020) Prediction of clamping deformation in vacuum fixture–workpiece system for low-rigidity thin-walled precision parts using finite element method. Int J Adv Manuf Technol 109(7):1895–1916. https://doi.org/10.1007/s00170-020-05745-5

    Article  Google Scholar 

  7. He N, Wang ZG, Jiang CY, Zhan B (2003) Finite element method analysis and control stratagem for machining deformation of thin-walled components. J Mater Process Technol 139(1–3):332–336. https://doi.org/10.1016/S0924-0136(03)00550-8

    Article  Google Scholar 

  8. Wu NH, Chan KC, Leong SS (1997) Static interactions of surface contacts in a fixture-workpiece system. Int J Comput Appl Technol 10(3–4):133–151. https://doi.org/10.1504/IJCAT.1997.062244

    Article  Google Scholar 

  9. Qin GH, Wang ZK, Rong YM, Li Q (2017) A unified approach to multi-fixturing layout planning for thin-walled workpiece. Proc IME B J Eng Manufact 231(3):454–469. https://doi.org/10.1177/0954405415585240

    Article  Google Scholar 

  10. Tie GP (2013) Research on the key technology of single point diamond turning for KDP crystal (Doctoral dissertation, National Defense Science and Technology)

  11. Yang JC, Zhang JF, Li J, Xie Q, Feng PF (2019) Optimum design and mechanical analysis for flat fixture of thin-walled wafer workpiece under vacuum adsorption in ultra-precision machining. Journal of Xi'an Jiaotong University 53(04):31–37. https://doi.org/10.7652/xjtuxb201904005

  12. Wang JH, Guo XY, Meng QX, Wang HX, Gu ZQ (2009) Influence on the profile accuracy in diamond turning of KDP crystal in vacuum chuck. Journal of Jiamusi University (Natural Science Edition) 027(001):1–3

  13. Wu SL (2019) Study on vacuum clamping and fly cutting processing deformation of pure copper flat parts (Master's thesis, Dalian University of Technology)

  14. Une A, Kai Y, Mochida M, Matsui S (2001) Flattening ability of a vacuum pin chuck around the periphery of a processed wafer. Microelectron Eng 57:49–57. https://doi.org/10.1016/S0167-9317(01)00428-2

    Article  Google Scholar 

  15. Une A, Ogasawara N, Fukuda T, Yoshise M, Xin P (2009) Influence of a lift hole-equipped pin chuck on wafer flatness. Microelectron Eng 86(4–6):517–520. https://doi.org/10.1016/j.mee.2009.01.079

    Article  Google Scholar 

  16. Une A, Yoshitomi K, Mochida M, Ogasawara N (2009) Influence of pin chuck ring seals and polishing steps on wafer flatness. Microelectron Eng 87(5–8):1646–1649. https://doi.org/10.1016/j.mee.2009.10.020

    Article  Google Scholar 

  17. Yi W (2015) Research on the mechanism of the influence of clamping force on the end milling deformation of thin plate parts and the method of deformation compensation (Doctoral dissertation, Shandong University)

  18. Liu YM (2012) Research on the mechanism of cutting rebound deformation and clamping optimization method for thin plate parts (Doctoral dissertation, Shandong University)

  19. Timoshenko S, Woinowsky-Krieger S (1989) Bending of long rectangular plates to a cylindrical surface. In: Phelps RH (ed) Theory of plates and shells, 2nd edn. McGraw-Hill, New York, pp 1–33

    MATH  Google Scholar 

  20. II’gamov MA, Moiseeva VE (2020) Dependence of axisymmetric bending of a circular plate on boundary conditions and pressure on its surface. Lobachevskii Journal of Mathematics 41:1216–1221. https://doi.org/10.1134/S1995080220070197

Download references

Funding

This work was supported by the National Natural Science Foundation of China, No. 51805498, and the Key Laboratory of ultra-precision-machining of CAEP, No. ZM18003.

Author information

Authors and Affiliations

  1. Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang, Sichuan, 621999, People’s Republic of China

    Yunhua Li, Jinxing Kong & Dongxing Du

Authors
  1. Yunhua Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jinxing Kong
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Dongxing Du
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

Design of the work, methodology, and data curation: Yunhua Li; investigation and writing—original draft preparation: Jinxing Kong; conceptualization, review, and editing: Dongxing Du. All authors have read and agreed to the published version of the manuscript.

Corresponding authors

Correspondence to Jinxing Kong or Dongxing Du.

Ethics declarations

Ethics approval

Not applicable.

Consent to participate

All authors have approved to participate.

Consent for publication

The manuscript is approved by all authors for publication.

Competing interests

The authors declare no competing interests.

Additional information

Publisher's note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Li, Y., Kong, J. & Du, D. Research on deformation mechanism and law of thin-walled flat parts in vacuum clamping. Int J Adv Manuf Technol 118, 2981–2992 (2022). https://doi.org/10.1007/s00170-021-08091-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-021-08091-2

Keywords

Search

Navigation