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Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe

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Abstract

This paper presents a self-evaluation method for sub-micrometer accuracy measurement of the cutting edge contour of a micro diamond tool with a force sensor-integrated fast tool servo (FS-FTS) on an ultra-precision lathe without using any accurate reference artifacts and additional surface form measuring instruments. At first, a series of grooves is cut side by side along the Z-direction over the outer surface of a cylindrical artifact mounted on the lathe spindle by the micro tool of the FS-FTS, which is mounted on the X-directional cross-slide (X-slide) of the lathe, to form a number of sharp line structures. The FS-FTS is then switched to a force feedback control mode for the cutting edge of the micro tool to scan across the line structures as a measuring stylus by moving the artifact with the Z-directional carriage slide (Z-slide) of the spindle. During the scanning, the contact force between the micro tool and the line structures is maintained constant by controlling the X-directional displacement of the cutting tool with the FS-FTS so that the tool cutting edge contour can be obtained from the tool scan trace profile provided by the linear encoder of the Z-slide and the displacement sensor of the FS-FTS. Measurement experiments of a micro tool with a nominal nose radius of 120 μm are carried out to demonstrate the feasibility of the proposed method.

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References

  1. Gao W, Araki T, Kiyono S, Okazaki Y, Yamanaka M (2003) Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder. Precis Eng 27:289–298

    Article  Google Scholar 

  2. Altintas Y, Woronko A (2002) A piezo tool actuator for precision turning of hardened shafts. CIRP Ann Manuf Technol 51:303–306

    Article  Google Scholar 

  3. Brinksmeier E, Riemer O, Gläbe R, Lünemann B, Kopylow CV, Dankwart C, Meier A (2010) Submicron functional surfaces generated by diamond machining. CIRP Ann Manuf Technol 59:535–538

    Article  Google Scholar 

  4. Lu XD, Trumper DL (2007) Spindle rotary position estimation for fast tool trajectory generation. Int J Mach Tools Manuf 47:1362–1367

    Article  Google Scholar 

  5. Lucca DA, Chou P, Hocken RJ (1998) Effect of tool edge geometry on the nanometric cutting of Ge. CIRP Ann Technol 47:475–478

    Article  Google Scholar 

  6. Klocke F, Kratz H (2005) Advanced tool edge geometry for high precision hard turning. CIRP Ann Manuf Technol 54:47–50

    Article  Google Scholar 

  7. Noh YJ, Arai Y, Tano M, Gao W (2008) Fabrication of large-area micro-lens arrays with fast tool control. Int J Precis Eng Manuf 9:32–38

    Google Scholar 

  8. Storch B, Tomkiewicz AZ (2012) Distribution of unit forces on the tool nose rounding in the case of constrained turning. Int J Mach Tools Manuf 57:1–9

    Article  Google Scholar 

  9. Denkena B, Köhler J, Ventura CEH (2013) Customized cutting edge preparation by means of grinding. Precis Eng 37:590–598

    Article  Google Scholar 

  10. Ohmori H, Katahira K, Naruse T, Uehara Y, Nakao A, Mizutani M (2007) Microscopic griding effects on fabrication of ultra-fine micro tools. CIRP Ann Manuf Technol 56:569–572

    Article  Google Scholar 

  11. Picard YN, Adams DP, Vasile MJ, Ritchey MB (2003) Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components. Precis Eng 27:59–69

    Article  Google Scholar 

  12. Teti R, Jemielniak K, Donnell G, Dornfeld D (2010) Advanced monitoring of machining operations. CIRP Ann Manuf Technol 59:717–739

    Article  Google Scholar 

  13. Noh YJ, Arai Y, Gao W (2009) Improvement of a fast tool control unit for cutting force measurement in diamond turning of micro-lens array. Int J Surf Sci 3:227–241

    Article  Google Scholar 

  14. Drescher J (1993) Scanning electron microscopic technique for imaging a diamond tool edge. Precis Eng 15:112–114

    Article  Google Scholar 

  15. Asai S, Taguchi Y, Horio K, Kasai T, Kobayashi A (1990) Measuring the very small cutting-edge radius for a diamond tool using a new kind of SEM having two detectors. CIRP Ann Manuf Technol 39:85–88

    Article  Google Scholar 

  16. Hansen HN, Carneiro K, Haitjema H, De Chiffre L (2006) Dimensional micro and nano metrology. CIRP Ann Manuf Technol 55:721–743

    Article  Google Scholar 

  17. Maeda Y, Uchida H, Yamamoto A (1989) Measurement of the geometric features of a cutting tool edge with the aid of a digital image processing technique. Precis Eng 11:165–171

    Article  Google Scholar 

  18. Doiron TD (1989) Computer vision based station for tool setting and tool form measurement. Precis Eng 11:231–238

    Article  Google Scholar 

  19. Shaw L, Ettl S, Mehari F, Weckenmann A, Häusler G (2013) Automatic registration method for multisensory datasets adopted for dimensional measurement on cutting tools. Meas Sci Technol 24:045002

    Article  Google Scholar 

  20. Byrne G, Dornfeld D, Denkena B (2009) Advancing cutting technology. CIRP Ann Manuf Technol 52:483–507

    Article  Google Scholar 

  21. Lucca DA, Seo YW (1993) Effect of tool edge geometry on energy dissipation in ultraprecision machining. CIRP Ann Manuf Technol 42:83–86

    Article  Google Scholar 

  22. Gao W, Motoki T, Kiyono S (2006) Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor. Precis Eng 30:396–405

    Article  Google Scholar 

  23. Gao W, Asai T, Arai Y (2009) Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools. CIRP Ann Manuf Technol 58:451–454

    Article  Google Scholar 

  24. Weckenmann A, Estler T, Peggs G, Mcmurtry D (2004) Probing systems in dimensional metrology. CIRP Ann Manuf Technol 53:657–684

    Article  Google Scholar 

  25. Sheiko SS, Möller M, Reuvekamp EMCM, Zandbergen HW (1994) Evaluation of the probing profile of scanning force microscopy tips. Ultramicroscopy 53:371–380

    Article  Google Scholar 

  26. Heike S, Wada Y (1999) Correlation between tip-apex shape and surface modification by scanning tunneling microscopy. J Appl Phys 86:4220–4224

    Article  Google Scholar 

  27. Colombi P, Alessandri I, Bergese P, Federici S, Depero LE (2009) Self-assembled polystyrene nanospheres for the evaluation of atomic force microscopy tip curvature radius. Meas Sci Technol 20:084015

    Article  Google Scholar 

  28. Harada Y, Sone H, Hosaka S (2008) Estimation of three-dimensional atomic force microscope tip shape from atomic force microscope image for accurate measurement. Jpn J Appl Phys 47:6186–6189

    Article  Google Scholar 

  29. Lee KW, Noh YJ, Arai Y, Shimizu Y, Gao W (2011) Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe. Int J Precis Technol 2:211–225

    Article  MATH  Google Scholar 

  30. Chen YL, Gao W, Ju BF, Shimizu Y, Ito S (2014) A measurement method of cutting tool position for replay fabrication of microstructured surface. Meas Sci Technol 25:064018

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Nanomechanics, Tohoku University, Sendai, 980-8579, Japan

    Yuan-Liu Chen, Yuki Shimizu, Yindi Cai, Shu Wang, So Ito & Wei Gao

  2. State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou, 310027, China

    Yuan-Liu Chen & Bing-Feng Ju

Authors
  1. Yuan-Liu Chen
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  2. Yuki Shimizu
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  3. Yindi Cai
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  4. Shu Wang
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  5. So Ito
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  6. Bing-Feng Ju
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  7. Wei Gao
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Corresponding author

Correspondence to Yuki Shimizu.

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Chen, YL., Shimizu, Y., Cai, Y. et al. Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. Int J Adv Manuf Technol 77, 2257–2267 (2015). https://doi.org/10.1007/s00170-014-6580-2

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  • DOI: https://doi.org/10.1007/s00170-014-6580-2

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