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Better ceramic substrates through zeolites

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Abstract

A novel synthetic route for fabricating dense aluminosilicate-based ceramics at relatively low temperatures (⩽1000°C) is described. The method involves ion exchange of an appropriate zeolite powder, followed by fabrication and sintering, to form a dense ceramic. Anorthite, cordierite- andβ-spodumene-based ceramic substrates with attractive physical properties for microelectronic packaging are obtained using these unusual precursors. A brief overview on the property requirements for substrates used in microelectronic packaging is outlined at the beginning of the article.

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References

  • Bedard R L and Flanigen E M 1990 US Patent 4 890 323

  • Breck D W 1984Zeolite molecular sieves (Malabar, FL: Robert E Krieger Publishing) pp 493–498 and references therein

    Google Scholar 

  • Chowdhry U and Sleight A W 1987Ann. Rev. Mater. Sci. 17 323

    Article  CAS  Google Scholar 

  • Chowdhry U, Corbin D R and Subramanian M A 1989 US Patent 4 814 303

  • Corbin D R, Parise J B, Chowdhry U and Subramanian M A 1991Mater. Res. Soc. Sym. Proc. 223 213

    Google Scholar 

  • Dyer A 1988Zeolite molecular sieves (Great Britain: John Wiley and Sons) p. 12

    Google Scholar 

  • Genesse C and Chowdhry U 1986 inBetter ceramics through chemistry II (eds) C J Brinker, D E Clark and D R Ulrich (Pittsburgh, PA: Mater. Res. Soc. Proc. 73) pp 693–703

    Google Scholar 

  • Gdula R 1970Am. Ceram. Soc. Bull. 50 555

    Google Scholar 

  • Harper C A and Staley W E 1985Electr. Packag. Prod. 58

  • Hayashi K and Fukui M 1980Sci. Technol. 29 58

    CAS  Google Scholar 

  • von Hippel A R 1954Dielectrics and waves (New York: John Wiley and Sons) p. 95

    Google Scholar 

  • Mussler B H and Shafer M W 1984Am. Ceram. Soc. Bull. 63 5

    Google Scholar 

  • Parise J B, Corbin D R and Subramanian M A 1989Mater. Res. Bull. 24 303

    Article  CAS  Google Scholar 

  • Roy R 1987Science 238 1664

    Article  CAS  Google Scholar 

  • Schwartz B 1984aJ. Phys. Chem. Solids 45 1051

    Article  CAS  Google Scholar 

  • Schwartz B 1984bAm. Ceram. Soc. Bull. 63 577

    CAS  Google Scholar 

  • Subramanian M A, Corbin D R and Farlee R D 1986Mater. Res. Bull. 21 1525

    Article  CAS  Google Scholar 

  • Subramanian M A, Corbin D R and Chowdhry U 1989 inCeramic substrates and packages for electronic applications (eds) M F Yan, K Niwa, H M O’Bryan Jr. and W S Young (Westerville, OH: Adv. in Ceramics 26) pp 239–247

    Google Scholar 

  • Thomas J M and Catlow C R A 1987 inProgress in inorganic chemistry (ed.) S J Lippard (New York: Wiley and Sons) Vol.35 p. 1

    Chapter  Google Scholar 

  • Tummala R R 1988Am. Ceram. Soc. Bull. 67 752

    CAS  Google Scholar 

  • Wilcox D L 1971Solid State Technol. 40

  • Zelinski B J J and Uhlmann D R 1984J. Phys. Chem. Solids 45 1069

    Article  CAS  Google Scholar 

Download references

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Author notes

  1. U Chowdhry

    Present address: Jackson Laboratory, E. I. du Pont de Nemours and Company, Chambers Works, 08023, Deepwater, New Jersey, USA

Authors and Affiliations

  1. E. I. duPont de Nemours and Company, Central Research and Development, Experimental Station, 19880-0328, Wilmington, Delaware, USA

    M A Subramanian, D R Corbin & U Chowdhry

Authors
  1. M A Subramanian
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  2. D R Corbin
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  3. U Chowdhry
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Subramanian, M.A., Corbin, D.R. & Chowdhry, U. Better ceramic substrates through zeolites. Bull. Mater. Sci. 16, 665–678 (1993). https://doi.org/10.1007/BF02757661

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