Ultratrace characterization of AlSiCu sputter targets for Th, U and 35 other elements by neutron activation analysis

Abstract

Instrumental and radiochemical neutron activation analysis has been applied to a comprehensive trace characterization of AlSiCu sputter targets. By instrumental neutron activation analysis via long-lived indicator radionuclides, up to 33 elements were assayed with detection limits between 0.01 and 200 ng·g⁻¹. The high activity of⁶⁴Cu and²⁴Na produced from the matrix significantly limits the instrumental performance via short- and medium-lived indicator dionuclides. For this reason, a radiochemical separation was developed based on adsorption of²⁴Na on hydrated antimony pentoxide and extraction of⁶⁴Cu by diethylammonium diethyldithiocarbamate from HCl medium. By this radiochemical method, As, Ga, K, La, Mn, Mo, Re, Sb, U and W could be assayed via medium-lived radionuclides and the achievable limits of detection were between 0.1 and 25 ng·g⁻¹. Further improvement of detection limits for U and Th was achieved by a selective radiochemical separation of²³⁹Np and²³³Pa on a Dowex 1×8 column in HF and HF/NH₄F medium providing limits of detection for U and Th of 0.06 and 0.02 ng·g⁻¹, respectively. These techniques were applied to the analysis of two AlSiCu sputter target materials. Results are compared with those of glow discharge mass spectrometry.