Abstract
Improvements in the quality and yield of semiconductor devices will rely on characterization methods that are informative, nondestructive, convenient, easy to use, and inexpensive. Ideally, one would like to perform the characterization procedure at room temperature on entire wafers, possibly even before the structure is removed from the growth chamber. Because of their simplicity and proven ability, the contactless electro-modulation methods of photoreflectance and contactless electroreflectance are ideally suited for this purpose. Modulation spectroscopy has already been applied to examine such devices as heterojunction bipolar transistors, pseudomorphic high-electron-mobility transistors, quantum-well lasers, vertical cavity surface-emitting lasers, multiple-quantum-well infrared detectors, superlattice optical mirrors, resonant tunneling structures, solar cells, and metal-oxide-semiconductor configurations.
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References
F.H. Pollak and H. Shen, “Modulation Spectroscopy of Semiconductors: Bulk/Thin Film, Microstructures, Surfaces/ Interfaces and Devices,” Materials Science and Engineering, RIO (1993), pp. 275–374.
O,J. Glembocki and B.V. Shanabrook, “Photoreflectance Spectroscopy of Microstructures,” Semiconductors and Semi-metals, 67, ed. D.G. Seiler and C.L. Littler (New York: Academic, 1992), pp. 222–292.
F.H. Pollak and O.J. Glembocki, “Modulation Spectroscopy of Semiconductor Microstructures: An Overview,” Proc. Soc. Photo-Optical Instrum. Engineers, 946 (SPIE, Bellingham, 1988), pp. 2–35.
F.H. Pollak, “Modulation Spectroscopy,” Encyclopedia of Materials Characterization: Surfaces. Interfaces and Thin Films, ed. C. Evans, R. Brundle, and S. Wilson (Butterworth-Heinemann, Boston, 1992), pp. 385–400.
F.H. Pollak et al., “Better Device Yields with Modulation Spectroscopy,” Photonics Spectra Magazine, 27(8) (1993), pp. 78–84.
H. Qiang et al., “Modulation Spectroscopy Characterization of Semiconductor Device Structures,” to be published in Asia-Pacific Engineering Journal. Part A: Electrical Engineering (1994).
W. Krystek et al., “Contactless HBT Equivalent Circuit Analysis Using the Modulation Frequency Dependence of Photoreflectance” (Paper to be presented at the 21st International Symposium on Compound Semiconductors, San Diego, CA, September 1994 and published in the proceedings).
V.T. Boccio and F.H. Pollak, private communication.
X. Yin and F.H. Pollak, “Novel Contactless Mode of Electroreflectance,” Appl. Phys. Lett., 59 (1991), pp. 2305–2307.
X. Yin et al., “Characterization of GaAs/GaAlAs Heterojunction Bipolar Transistor Structures Using Photoreflectance,” Appl. Phys. Lett., 56 (1990), pp. 1278–1280; also, “Photoreflectance of GaAs/GaAlAs Heterojunction Bipolar Transistor Structures,” Proc. Soc. Photo-Optical Instrum. Engineers, 1286 (SPIE, Bellingham, 1990), pp. 404-413.
N. Bottka et al., “Qualification of OMVPE AlGaAs/GaAs HBT Structures Using Nondestructive Photoreflectance Spectroscopy,” J. Cryst. Growth, 107 (1991), pp. 893–897.
D. Yan et al., “Photoreflectance Characterization of an InP/InGaAs Heterojunction Bipolar Transistor Structure,” Appl. Phys. Lett., 61 (1992), pp. 2066–2068.
K.T. Hsu et al., “Photoreflectance Characterization of an InAlAs/InGaAs Heterostructure Bipolar Transistor,” Appl. Phys. Lett., 64 (1994), pp. 1974–1976.
L.W. Yang et al., “Material and Device Characterization of High Quality InGaP/GaAs HBT Structures Using Photoreflectance, Capacitance-and Current-Voltage Meas urements” (Paper presented at the 1993 Electronic Materials Conference, Santa Barbara, CA, June 1993).
A. Badakhshan et al., “Photoreflectance of Semiconduc-ors above the Band Gap,” Nanostructure Physics and Fabrication, eds. M.A. Reed and W.P. Kirk (New York: Academic,1989), pp. 485–493.
Y. Yin et al., “Two-Dimensional Electron Gas Effects in the Electromodulation Spectra of a Pseudomorphic Ga Al As / InGaAs/GaAs Modulation-Doped Quantum Well Structure,” Appl. Phys. Lett., 61 (1992), pp. 1579–1581; also, “Electromodulation Spectroscopy of a Pseudomorphic GaAlAs/InGaAs/GaAs Modulation-Doped Quantum Well Structure: Two-Dimensional Electron Gas Effects,” Proc. Soc. Photo-Optical Instrum. Engineers, 675 (SPIE, Bellingham, 1992), pp. 498-509.
Y. Yinet al., “Room Temperature Photoreflectance Characterization of Pseudomorphic Ga Al As / InGaAs/GaAs High Electron Mobility Transistor Structures Including the Two-Dimensional Electron Gas Density,” Semicond. Sci. Technol., 8 (1993), pp. 1599–1604.
A. Dimoulas et al., “Degenerate Electron Gas Effects in the Modulation Spectroscopy of Pseudomorphic Al0.32Ga0.68As/In0.15Ga0.85As/GaAs High Electron Mobility Transistor Structures,” Appl. Phys. Lett., 63 (1993), pp. 1417–1419.
G. Gumbs et al., “Many-Body Effects in the Electromodulation Spectra of Modulation-doped Quantum Wells: Theory and Experiment,” Phys. Rev., B48 (1993), pp. 18328–18331.
K. Satzke et al., “Electroabsorption Studies on InGaAs/ lnGaAsP Quantum-Well Laser Structures,” J. Appl. Phys., 69 (1991), pp. 7703–7710.
V.T. Boccio and F.H. Pollak, private communication.
S. Moneger et al., “Contactless Electroreflectance of Three InGaAs Quantum Wells Placed in a GaAs/AlGaAs Resonant Cavity” (Paper to be presented at the 21st International Symposium on Compound Semiconductors, San Diego, C A, September 1994 and to be published in the proceedings).
P.A. Dafesh, “Characterization of GaAs/GaAlAs Multiple Quantum Well Infrared Detector Structures Using Photoreflectance,” J. Appl. Phys., 71 (1992), pp. 5154–5160.
R.L. Tober et al., “Piezoreflectance Characterization of Resonant Tunneling and Modulation-Doped Heterostructures,” J. Electron. Mat., 18 (1989), pp. 379–384.
I.J. Fritz, P.L. Gourley, and T.J. Drummond, “Electric Field Response of a Semiconductor Superlattice Optical Mirror from Electroreflectance Spectra,” Appl. Phys. Lett., 55 (1989), pp. 1324–1326.
R.G. Rodrigues et al., “Photoreflectance Characterization of InP and GaAs Solar Cells,” Proceedings of the Twenty-Third IEEE Photovoltaic Specialists Conference (New York: IEEE, 1993), pp. 681–685.
K. Misawa, A. Moritani, and J. Nakai, “Electroreflectance of Si-MOS,” Jpn. J. Appl. Phys., 15 (1976), pp. 1309–1316.
A. Ksendzov et al., “Electroreflectance Study of HgCdTe in the Metal-Insulator-Semiconductor Configuration at 77 K,” Appl. Phys. Lett., 49 (1986), pp. 648–650.
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Pollak, F.H., Qiang, H., Yan, D. et al. Analyzing semiconductor devices using modulation spectroscopy. JOM 46, 55–59 (1994). https://doi.org/10.1007/BF03222585
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DOI: https://doi.org/10.1007/BF03222585