Abstract
Leakage behavior and distortion of the polarization hysteresis loop in ferroelectric thin films are analyzed by applying a totally depleted asymmetric back-to-back Schottky model, with the Pt/Pb (Zr, Ti) O3/Pt (Pt/PZT/Pt) sandwich structural thin film capacitor as an example. Some interesting phenomena resulting from the asymmetric interfaces, such as the leakage current level, the flat-band voltage, the disclosure of the hysteresis loop, and the change in the remanent polarization and coercive field, as well as the vertical drift of the polarization hysteresis loop, are discussed in detail. The calculated results are also verified with experiments.
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Swartz, S. L., Wood, V. E., Ferroelectric thin films,Condensed Matter News, 1992, 1(5): 4.
Sinharoy, S., Buhay, H., Lampe, D. R.et al., Integration of ferroelectric thin films into nonvolatile memories,J. Vac. Sci. Technol., 1992, A10(4): 1554.
Yoo, I. K., Desu, S. B., Xing, J., Correlation among degradation in lead zirconate titanate thin film capacitors,Mat. Res. Soc. Symp. Proc., 1993, 310: 165.
Yamauchi, S., Tamura, H., Yoshimaru, M.,et al., Electrical and crystallographic properties of sputtered Pb (Zr, Ti) O3 films treated by rapid thermal annealing,Japan J. Appl. Phys., 1993, 32(9B): 4118.
Lichtenwalner, D. J., Dat, R., Auciello, O.,et al., Effect of electrodes for the ferroelectric properties of pulsed laser ablation deposited PbZrxTi1−xO3 thin film capacitors,Ferroelectrics, 1994, 152: 97.
Sudhama, C., Campbell, A. C., Maniar, P. D.,et al., A model for electrical conduction in metal-ferroelectric-metal thin film capacitors,J. Appl. Phys., 1994, 75(2): 1014.
Scott, J. F., de Araujo, C. A. P., Melnick, B. M.,et al., Quantitative measurement of space charge effect in lead-zirconate-titanate memories,J. Appl. Phys., 1991, 70(1): 382.
Hu, H., Krupanidhi, S. B., Current-voltage characteristics of ultrafine-grain ferroelectric Pb (Zr, Ti) O3 thin films,J. Mater. Res., 1994, 9(6): 1484.
Wu, L., Wu, T. S., Wei, C. C.,et al., The DC resistivity of modified PZT ceramics,J. Phys. C., 1983, 16(11): 2823.
Simmons, J. G., Generalized formula for the electric tunnel effect between similar electrodes separated by a thin insulating film,J. Appl. Phys., 1963, 34(6): 1793.
Miller, S. L., Schwank, J. R., Nasby, R. D.,et al., Modeling of ferroelectric capacitor switching with asymmetric nonperiodic input signals and arbitrary initial conditions,J. Appl. Phys., 1991, 70(5): 2849.
Zheng, L., Chen, Y., Zhang, S.,et al., Characterization of Pb (Zr, Ti)O3 thin films on SOI prepared by excimer laser deposition,Integ. Ferroelectrics, 1995, 9: 63.
Chang, J. F., Desu, S. B., Effects of dopants in PZT films,J. Mater. Res., 1994, 9(4): 955.
Sudhama, C., Kim, J., Lee, J.,et al., Effect of La doping on the electrical properties of sol-gel derived ferroelectric lead-zirconate titanate for ultra-large-scale integration dynamic random access memory applications,J. Vac. Sci. Technol., 1993, B11(4): 1302.
Rohrer, G., Narayan, S., McMillan, S.,et al., A new technique for characterization of thin film ferroelectric memory devices,J. Vac. Sci. Technol., 1988, A6(3): 1756.
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Project supported by Shanghai Research Center for Applied Physics.
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Zheng, L., Lin, C., Xu, H. et al. Leakage behavior and distortion of the hysteresis loop in ferroelectric thin films. Sci. China Ser. E-Technol. Sci. 40, 126–134 (1997). https://doi.org/10.1007/BF02916944
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DOI: https://doi.org/10.1007/BF02916944