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Combining ellipsometry and electron microscopy for the identification of the initial stages of aluminum oxidation. 1. Methodical aspect

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Abstract

A general scheme combining the techniques of laser ellipsometry and electron auger-spectroscopy under laboratory conditions is designed and tested on the basis of a return-path autocollimation scheme. A Gartner ellipsometer in combination with LAS-300 electron spectrometer are used in studying the initial stages of vacuum oxidation of aluminum at room temperature. The methodical principles of revealing the kinetic stages of the formation of a new phase in the surface layer are considered according to the data of both techniques. Three stages of aluminum oxidation are distinguished. At a low coverage, oxygen atoms chemisorb on the surface. At a higher coverage, they penetrate in the metal and then form an oxide.

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Authors and Affiliations

  1. Institute of Physical Chemistry, Russian Academy of Sciences, Leninskii pr. 31, 117915, Moscow, Russia

    V. A. Kotenev

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  1. V. A. Kotenev
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The work was financially supported by the Russian Foundation for Basic Research, project no. 99-03-32217.

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Kotenev, V.A. Combining ellipsometry and electron microscopy for the identification of the initial stages of aluminum oxidation. 1. Methodical aspect. Prot Met 36, 366–374 (2000). https://doi.org/10.1007/BF02758509

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  • DOI: https://doi.org/10.1007/BF02758509

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