Skip to main content
SpringerLink
Log in

Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films

  • Published:
Bulletin of Materials Science Aims and scope Submit manuscript

Abstract

Amorphous carbon film, bdalso known as DLC film, bdis a promising material for tribological application. It is noted that properties relevant to tribological application change significantly depending on the method of preparation of these films. These properties are also altered by the composition of the films. In view of this, bdthe objective of the present work is to compare the nanoindentation and atomic force microscopy (AFM) study of diamond like carbon (DLC) film obtained by plasma enhanced chemical vapour deposition (bdPECVD with the Ti containing amorphous carbon (Ti/a- C : H) film obtained by unbalanced magnetron sputter deposition (UMSD). Towards that purpose, DLC and Ti/a- C : H films are deposited on silicon substrate by PECVD and UMSD processes, respectively. The microstructural features and the mechanical properties of these films are evaluated by scanning electron microscopy (SEM), bdtransmission electron microscopy (TEM), nanoindentation and by AFM. The results show that the PECVD DLC film has a higher elastic modulus, hardness and roughness than the UMSD Ti/a- C : H film. It also has a lower pull off force than Ti containing amorphous carbon film.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  • Bhusan B 1999Handbook of micro/nanotribology Boca Rato, FL: CRC Press 2nd ed.

    Google Scholar 

  • Butter R, Allen M Chandra L,Lettington A H and Rushton N 1995Diamond & Relat. Mater. 4 857

    Article  CAS  Google Scholar 

  • Dean K A and Chalamala B R 1999Appl. Phys. Lett. 76 375

    Article  Google Scholar 

  • Demigan H and Klages C P 1991Surf. Coat. Technol. 49 543

    Article  Google Scholar 

  • Donnet C 1996Surf. Coat. Technol. 80 139

    Article  Google Scholar 

  • Grischke M, Hicke A, Morgenweck F and Demigan H 1998Diamond & Relat. Mater. 7 454

    Article  CAS  Google Scholar 

  • Haubner R and Lux B 1993Diamond Relat. Mater. 2 1277

    Article  CAS  Google Scholar 

  • Holmberg K and Mathews A 1994Coat. tribology (New York: Elsevier)

    Google Scholar 

  • Kohzaki M, Higuchi K, Noda S and Uccida K 1992J. Mater. Res. 7 1769

    Article  CAS  Google Scholar 

  • Kvasnica S, Fasching R and Kohl F 2001aProc. of int. symp. on plasma chemistry 15, Orleans, France

  • Kvasnica S, Fallman W, Biederman H, Boldyreva H and Sla-vínská D 2001bDeposition and characterization of Ti/C: Hfilms, in Proc. int. symp. on plasma chemistry 15, Orleans, France

  • Miyoshi K, Wu R L C and Garscaden A 1992Surf. Coat. Technol. 54/55 428

    Google Scholar 

  • Monaghan D P, Teer D G, Logan P A, Efeoglu I and Arnell R D 1993Surf. Coat.Technol. 60 525

    Article  CAS  Google Scholar 

  • Oliver W C and Pharr G M 1992J. Mater. Res. 7 1564

    Article  CAS  Google Scholar 

  • Robertson J 2002Mater. Sci. & Engg. R37 129

    Article  CAS  Google Scholar 

  • Schalko J 2001Deposition and characterization of PECVD carbon and carbon alloy films in various modification, Ph D thesis, Vienna University of Technology, Vienna

    Google Scholar 

  • Wu R L C, Miyoshi K, Vuppuladhadium R and Jackson H E 1992Surf. Coat. Technol. 54/55 576

    Google Scholar 

  • Zehnder T and Patscheider J 2000Surf. Coat. Technol. 133–134 138

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Austrian Centre of Competence for Tribology, Viktor Kaplan-Straβe 2, A 2700, Wiener Neustadt, Austria

    A. Pauschitz & Manish Roy

  2. Defence Metallurgical Research Laboratory, 500 058, Hyderabad, India

    Manish Roy

  3. Institute of Industrial Electronics and Material Science, Vienna University of Technology, A 1040, Vienna, Austria

    J. Schalko & S. Kvasnica

  4. Institute of Material Science and Testing, Vienna University of Technology, A 1040, Vienna, Austria

    T. Koch

  5. Institute of Solid State Physics, Vienna University of Technology, A 1040, Vienna, Austria

    C. Eisenmenger-Sittner

  6. Boltzman Institute of Biomedical Microtechnology, Vienna University of Technology, A 1040, Vienna, Austria

    S. Kvasnica

Authors
  1. A. Pauschitz
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Schalko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. Koch
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. C. Eisenmenger-Sittner
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. Kvasnica
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Manish Roy
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pauschitz, A., Schalko, J., Koch, T. et al. Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films. Bull Mater Sci 26, 585–591 (2003). https://doi.org/10.1007/BF02704320

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02704320

Keywords

Search

Navigation