Abstract
Considerable effort has been invested in developing thin-film solid microbatteries as possible integrated components in microelectronics. Advances have been made particularly in the engineering of lithium/amorphous inorganic electrolyte/layered compound cells fabricated using various evaporation techniques. The main features of these cells are influenced by the characteristics of the fast ionic conductor and the insertion compound layers which are discussed in detail in this work. Design and optimization of lithium-microbattery components are discussed. Different electrochemical systems using lithium borate-glass films as solid electrolytes have been fabricated and characterized. Thin-film active cathodic materials include transition-metal dichalcogenides such as TiS2, MoS2, non-transition-metal chalcogenides such as InSe and transition-metal oxides such as MoO3, V2O5, V6O13 films. Particular attention is paid to the structural and transport properties of these materials and their behaviour in electrochemical lithium cells are presented. Thermodynamics and kinetics are studied as functions of the growth conditions of thin-film components. The physical properties are discussed in relation to the electrochemical cell behavior and battery performance.
Similar content being viewed by others
5. References
C. Julien and M. Balkanski, in: Solid State Microbatteries (J.R. Akridge and M. Balkanski, Eds.) NATO-ASI Series, Ser.B217, Plenum, New York, 1990, p. 233
J.H. Kennedy, Thin Solid Films43, 41 (1977)
C. Julien, Mater. Sci. Eng. B6, 9 (1990)
K. Kanehori, K. Matsumoto, K. Miyauchi and T. Kudo, Solid State Ionics9/10, 1455 (1983)
J.B. Bates, N.J. Dudney, Y. Chu and P. Mazumdar, in: Solid State Ionics (G.A. Nazri, R.A. Huggins and D.F. Shriver, Eds.) vol.135, Mat. Res. Soc., Pittsburg, 1989, p. 143
G. Meunier, R. Dormoy and A. Levasseur, Mater. Sci. Eng. B3, 19 (1989)
M. Balkanski, C. Julien and J.Y. Emery, J. Power Sources26, 615 (1989)
S.D. Jones and J.R. Akridge, Solid State Ionics53–56, 628 (1992)
X. Huang, L. Chen and J. Schoonman, J. Power Sources43/44, 487 (1993)
L. Jourdaine, J.L. Souquet, V. Delord and M. Ribes, Solid State Ionics28/30, 1490 (1988)
S.D. Jones and J.R. Akridge, J. Power Sources43/44, 505 (1993)
M. Wakihara, T. Uchida, T. Morishita, H. Wakamatsu and M. Taniguchi, J. Power Sources20, 199 (1987)
J.R. Upton, J.R. Owen, P.J. Tufton, J.D. Benjamin, B.C.H Steele and R.A. Rudkin, Solid State Ionics28/30, 1486 (1988)
T. Oi, Appl. Phys. Lett.37, 244 (1980)
M. Eddrief, P. Dzwonkowski, C. Julien and M. Balkanski, Solid State Ionics45, 77 (1991)
J.B. Bates, N.J. Dudney, G.R. Gruzalski, R.A. Zuhr, A. Choudhury, C.F. Luck and J.D. Robertson, Solid State Ionics53/56, 647 (1992)
U. Von Alpen and M.F. Bell, in: Fast Ion Transport in Solids (P. Vashishta, J.N. Mundy and G.K. Shenoy, Eds.) North-Holland, Amsterdam, 1979, p. 463
H. Ohtsuka, S. Okada and J. Yamaki, Solid State Ionics40/41, 964 (1990)
C.C. Liang, J. Epstein and B.H. Boyle, J. Electrochem. Soc.116, 1452 (1969)
C. Julien, M. Massot, P. Dzwonkowski, J. Emery and M. Balkanski, Infrared Phys.29, 769 (1989)
P.J. Bray, S.A. Feller, G.E. Jellison Jr. and J.H. Yun, J. Non-Cryst. Solids38/39, 93 (1980)
M. Massot, E. Haro, M. Oueslati and M. Balkanski, in: Solid State Ionics (G.A. Nazri, R.A. Huggins and D.F. Shriver, Eds.) Mat. Res. Soc., Pittsburg, 1989, vol.135, p. 207
C. Julien, M. Massot, M. Balkanski, A. Krol and W. Wazarewicz, Mater. Sci. Eng. B3, 307 (1989)
R.J. Charles, J. Appl. Phys.32, 1115 (1961)
W. Weppner, J. Electrochem. Soc.138, 146C (1991)
C. Delmas and R. Brec, in: Report on the State of Research and Future Trends in Energy Storage Materials (G. Benedek and M. Balkanski, Eds.) UNESCO-ROSTE, Venice, 1990, p. 75
C. Julien, O.M. Hussain, L. El-Farh and M. Balkan-ski, Solid State Ionics53/56, 400 (1992)
C. Julien, L. El-Farh, M. Balkanski, O.M. Hussain and G.A. Nazri, Appl. Surf. Sci.65/66, 325 (1993)
G.A. Nazri and C. Julien, Solid State Ionics53/56, 400 (1992)
C. Julien and G.A. Nazri, Solid State Ionics68, 111 (1994)
C.J. Wen, B.A. Boukamp, R.A. Huggins and W. Weppner, J. Electrochem. Soc.126, 2258 (1979)
A. Honders, E.W.A. Young, A.J.H. Hintzen, J.H.W. de Wit and G.H.J. Broers, Solid State Ionics15, 277 (1985)
C. Julien and A. Gorenstein, unpublished data.
W. Weppner and R.A. Huggins, J. Electrochem. Soc.124, 1569 (1977)
J. Maier, in: Solid State Ionics II (G.A. Nazri, R.A. Huggins, D.F. Shriver and M. Balkanski, Eds.) Mater. Res. Soc., Pittsburgh, 1991, vol210, p. 499
L. Murawski, C. Gledel, C. Sanchez, J. Livage and J.P. Audiere, J. Non-Cryst. Solids89, 98 (1987)
K. West, B. Zachau-Christiansen, S.V. Skaarup and F.W. Poulsen, Solid State Ionics57, 41 (1992)
L. Abello, E. Husson, Y. Repelin and G. Lucazeau, Spectrochim. Acta39A, 641 (1983)
M. Vanhaelst and P. Clauws, Phys. Status Solidi (b)87, 719 (1978)
T. Allersma, R. Hakim, T.N. Kenndy and J.D. Mackenzie, J. Chem. Phys.46, 154 (1967)
N.F. Mott, J. Non-Cryst. Solids1, 1 (1968)
L. Murawski, C. Sanchez, J. Livage and J.P. Audiere, J. Non-Cryst. Solids124, 71 (1990)
J.M. Cocciantelli, J.P. Doumerc, M. Pouchard, M. Broussely and J. Labat, J. Power Sources34, 103 (1991)
P. Baudry, M.A. Aegerteer, D. Deroo and B. Valla, J. Electrochem. Soc.138, 460 (1991)
J.B. Bates, G.R. Grzalski, N.J. Dudney, C.F. Luck and X. Yu, Proc. 9th Int. Conf. on Solid State Ionics, North-Holland, Amsterdam, 1994
K. West, B. Zachau-Christiansen and T. Jacobsen, Electrochim. Acta28, 1829 (1983)
I. Ivanov, A. Gorenstein, A. Khelfa, J.P. Guesdon and C. Julien, Thin Solid Films (1994) in press.
C. Julien, I. Samaras, M. Tsakiri, P. Dzwonkowski and M. Balkanski, Mater. Sci. Eng. B3, 25 (1989)
C. Liquan and J. Schoonman, Solid State Ionics67, 17 (1994)
D. Zehnder, C. Deshpandey, B. Dunn and R.F. Bunshah, Solid State Ionics18/19, 813 (1986)
K. Kanehori, Y. Ito, F. Kirino, K. Miyauchi and T. Kudo, Solid State Ionics18/19, 818 (1986)
A.A. van Zomeren, J.H. Koegler, J. Schoonman and P.J. van der Put, Solid State Ionics53/56, 333 (1992)
A.H. Thompson, in: Fast Ion Transport in Solids (P. Vashishta, J.N. Mundy and G. Shenoy, Eds.), North-Holland, Amsterdam, 1979, p. 47
C.A. Kukkonen, W.J. Kaiser, E.M. Logothetis, B.J. Blumenstock, P.A. Schroeder, S.P. Faile, R. Colella and J. Gambold, Phys. Rev. B24, 1691 (1981)
S. Kikkawa, R. Shimanouchi-Futagami and M. Koizumi, Appl. Phys. A49, 105 (1989)
K. Kanehori, K. Miyauchi and T. Kudo, European Patent, 0103470,A1 (1984).
M.S. Whittingham, in: Fast Ion Transport in Solids (P. Vashishta, J.N. Mundy and G. Shenoy, Eds.), North-Holland, Amsterdam, 1979, p. 17
S. Basu and W.L. Worrell, in: Fast Ion Transport in Solids (P. Vashishta, J.N. Mundy and G. Shenoy, Eds.), North-Holland, Amsterdam, 1979, p. 149
N. Imanishi, K. Kanamura and Z. Takehara, J. Electrochem. Soc.139, 2082 (1992)
M.A. Pye and R.R. Haering, Can. J. Phys.61, 76 (1983)
C. Julien, S.I. Saikh and G.A. Nazri, Mater. Sci. Eng. B15, 73 (1992)
M.S. Whittingham, Prog. Solid State Chem.12, 41 (1978)
M. Armand, in: Materials for Advanced Batteries (D.W. Murphy, J. Broadhead and B.C.H. Steele, Eds.), Plenum, New York, 1980, p. 145
J.P. Guesdon, A. Kobbi, C. Julien, M. Balkanski, Phys. Status Solidi (a)102, 327 (1987)
T.T. Nang, T. Matsushita, M. Okuda and A. Suzuki, Jpn. J. Appl. Phys.16, 253 (1977)
C. Julien and I. Samaras, Solid State Ionics27, 101 (1988)
J.Y. Emery, C. Julien, M. Jouanne and M. Balkanski, Appl. Surf. Sci.33/34, 619 (1988)
C. Julien, A. Khelfa, N. Benramdane, J.P. Guesdon, P. Dzwonkowski, I. Samaras and M. Balkanski, Mater. Sci. Eng. B23, 105 (1994)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Julien, C., Gorenstein, A. Materials design and optimization for thin-film microbatteries. Ionics 1, 193–210 (1995). https://doi.org/10.1007/BF02426018
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02426018