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Thermodynamic modelling of CVD of high-T c superconductors

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Abstract

Thermodynamic modelling of CVD of the superconducting phases in the Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O systems is reviewed. Both MOCVD and halide CVD are considered. The results are discussed in terms of calculated CVD stability diagrams. The influence of deposition parameters, including selection of precursors, on the existence and extension on those stability regions, where the superconducting phases can be deposited, is described. The results of the thermodynamic modelling are compared with experimental investigations. The agreement between thermodynamics and experiments is satisfactory, indicating that thermodynamic modelling can be used as a guide to predict the optimum deposition conditions.

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Authors and Affiliations

  1. Thin Film and Surface Chemistry Group, Department of Inorganic Chemistry, University of Uppsala, Box 531, S-751 21, Uppsala, Sweden

    A. Hårsta

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  1. A. Hårsta
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Financial support from the Swedish National Board for Industrial and Technical Development is gratefully acknowledged.

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Hårsta, A. Thermodynamic modelling of CVD of high-T c superconductors. Journal of Thermal Analysis 48, 1093–1104 (1997). https://doi.org/10.1007/BF01979156

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