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Effect of interfacial-roughness replication on the diffuse X-ray reflection from periodical multilayers

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Abstract

The correlation of roughness profiles of different interfaces in a periodical multilayer affects the reciprocalspace distribution of the diffusely reflected X-ray intensity. This distribution has been calculated by means of the Distorted-Wave Born Approximation (DWBA) method and compared with the results of X-ray reflectometry on periodical metallic multilayers. It has been shown that the measurement of the reciprocal-space distribution of diffusely scattered intensity is a suitable non-destructive method to investigate the roughness replication in multilayers.

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Holý, V., Kuběna, J., van den Hoogenhof, W.W. et al. Effect of interfacial-roughness replication on the diffuse X-ray reflection from periodical multilayers. Appl. Phys. A 60, 93–96 (1995). https://doi.org/10.1007/BF01577620

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  • DOI: https://doi.org/10.1007/BF01577620

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