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Nanosecond-time-resolution thermal emission measurement during pulsed excimer-laser interaction with materials

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Abstract

A nanosecond-time-resolution pyrometer has been developed for measuring the transient surface temperature of a solid material heated by pulsed excimer-laser irradiation. Fast germanium diodes are employed to capture the transient thermal emission signals in the wavelength range between 1.2 and 1.6 pm. The surface temperature is derived from the measured spectral thermal emission. The directional spectral emissivity is determined in situ by measuring the transient directional spectral reflectivity and applying Kirchhoffs law. The experimental results are in good agreement with numerical thermal modeling predictions. The pyrometric thermal emission measurement also yields the solid/liquid interface temperature during the pulsed excimer-laser-induced melting. The relation between the measured interface superheating temperature and the interface velocity reveals the melting kinetic relation during the high-power, short-pulse laser-induced phase-change processes.

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Abbreviations

C 1, blackbody radiation constant:

C 1 = 3.7420 × 108 W μm4/m2

C 2, blackbody radiation constant:

C 2 = 1.4388 × 104 μm K

C p :

specific heat in J/kg K

dA :

area on the laser-heated spot whose thermal emission is detected in mm2

D :

Detector responsivity in A/W

e λb :

blackbody spectral emissive power in W/m2 μm

f :

focal length of lens in mm

F :

laser fluence in J/cm2

i:

complex imaginary unit (i = √−1)

K :

thermal conductivity in W/m K

L :

latent heat in J/kg

M :

minimization function to calculate the temperature from thermal emission in (6) and (10)

ñ :

complex refractive index

R s :

reflectivity

R s :

specular reflectivity

R d :

diffuse reflectivity

T :

temperature in K

T eff :

effective temperature (7) in K

T int :

interface temperature in K

T m :

equilibrium melting temperature in K

V :

voltage recorded on the oscilloscope in V

V int :

velocity of the solid/liquid interface in m/s

W :

impedance of the oscilloscope in Ω

Superscript: i :

directional

Subscripts: c :

calculated results

exe:

excimer laser

ℓ:

liquid silicon

m:

measured results

qz:

quartz substrate

s:

solid silicon

λ :

spectral quantity

α :

absorptivity

ΔT :

interfacial superheating temperatureΔT =T t −T m in K

ɛ :

emissivity

θ :

polar angle

Θ :

angle of light incidence

λ :

wavelength in μm

ϱ :

density in kg/m3

τ :

transmissivity of optics

φ :

Azimuthal angle

References

  1. C.R. Phipps, R.W. Dreyfus: InLaser Ionization Mass Analysis, ed. by A. Vertes, R. Gigbels, F. Adams (Wiley-Interscience, New York 1993) p. 369

    Google Scholar 

  2. B. Stritzker, A. Pospieszczyk, J.A. Tagle: Phys. Rev. Lett.47, 356 (1981)

    Google Scholar 

  3. P. Baeri, S.U. Campisano, E. Rimini, J.P. Zhang: Appl. Phys. Lett.45, 398 (1984)

    Google Scholar 

  4. J.A. Kittl, R. Reitano, M.J. Aziz, D.P. Brunco, M.O. Thompson: J. Appl. Phys.73, 3725 (1993)

    Google Scholar 

  5. G.E. Jellison Jr., D.H. Lowndes, D.N. Mashburn, R.F. Wood: Phys. Rev. B34, 2407 (1986)

    Google Scholar 

  6. I. Lukes, R. Sasik, R. Cerny: Appl. Phys. A54, 327 (1992)

    Google Scholar 

  7. X. Xu; C.P. Grigoropoulos, R.E. Russo: ASME J. Heat Transfer117,17 (in press)

  8. X. Xu, C.P. Grigoropoulos, R.E. Russo: Appl. Phys. Lett.65, 1745 (1994)

    Google Scholar 

  9. G.M. Foley, M.S. Morse, A. Cezairliyan: InTemperature, its Measurement and Control in Science and Industry V, ed. by J.F. Schooley (American Institute of Physics, New York 1982) p. 447

    Google Scholar 

  10. K.A. Jackson: InCrystal Growth and Characterization, ed. by R. Ueda, J.B. Mullin (North-Holland, Amsterdam 1975) p. 21

    Google Scholar 

  11. X. Xu, C.P. Grigoropoulos, R.E. Russo: InProc. 6th AIAA/ASME Thermophysics and Heat Transfer Conf., Colorado Springs, CO, Vol. HTD 280 (The American Society of Mechanical Engineers, New York 1994) p. 79. ASME J. Heat Transfer118 (in press)

    Google Scholar 

  12. R. Siegel, J.R. Howell:Thermal Radiative Heat Transfer, 3rd edn. (Hemisphere, Bristol 1992)

    Google Scholar 

  13. Y.S. Touloukian:Thermophysical Properties of Matter, Thermal Conductivity (Plenum, New York 1985)

    Google Scholar 

  14. K.M. Shvarev, B.A. Baum, P.V. Gel'd: Sov. Phys.-Solid State16, 2111 (1975)

    Google Scholar 

  15. D.F. Edwards: InHandbook of Optical Constants of Solids, ed. by E.D. Palik (Academic, New York 1985) p. 547

    Google Scholar 

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Author notes

  1. X. Xu

    Present address: School of Mechanical Engineering, Purdue University, 47907, West Lafayette, IN, USA

Authors and Affiliations

  1. Department of Mechanical Engineering, The University of California, 94720, Berkeley, CA, USA

    X. Xu & C. P. Grigoropoulos

  2. Lawrence Berkeley Laboratory, Energy and Environmental Division, 94720, Berkeley, CA, USA

    R. E. Russo

Authors
  1. X. Xu
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  2. C. P. Grigoropoulos
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  3. R. E. Russo
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Corresponding author

Correspondence to C. P. Grigoropoulos.

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Xu, X., Grigoropoulos, C.P. & Russo, R.E. Nanosecond-time-resolution thermal emission measurement during pulsed excimer-laser interaction with materials. Appl. Phys. A 62, 51–59 (1996). https://doi.org/10.1007/BF01568087

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