Abstract
Silicon nitride powders were synthesized in an atmospheric-pressure convection-stabilized arc using silicon and ammonia as reactants. The morphology and particle size distributions of the silicon nitride particles were characterized by SEM, TEM, and electron diffraction analyses. The silicon nitride particles collected in the plasma reactor were formed by either gas-condensed phase reactions or chemical vapor reactions. The morphologies of the particles formed by gas-condensed phase reactions consisted of β-Si3N4 prisms, α-Si3N4 matte, α-Si3N4 needles, and spaghetti-like whiskers. For the homogeneously nucleated particles, the morphologies included dendrites, needles, platelets, and amorphous particles. Most of the particles formed were aggregates with particle size distributions ranging from 500 to 1500 Å depending on the location of injection of the reactants.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
W. R. Cannon, S. C. Danforth, J. H. Flint, J. S. Haggerty, and R. A. Marra,J. Am. Ceram. Soc.,65, 324 (1982).
Y. P. Chyou, R. M. Young, and E. Pfender, ISPC-7, C. J. Timmermans, ed., University of Eindhoven, Eindhoven, The Netherlands, Vol. 3 (1985), p. 892.
P. Kong, R. M. Young, T. T. Huang, and E. Pfender, ISPC-7, C. J. Timmermans, ed., University of Eindhoven, Eindhoven, The Netherlands, Vol. 2 (1985), p. 674.
Yl Chang, Ph. D. Thesis, University of Minnesota (1986).
K. Kijima, T. Yamana, and H. Tanaka,J. Cryst. Growth,24/25, 183 (1974).
K. W. Bean, P. S. Gleim, W. R. Runyan, and R. L. Yeakley,J. Electrochem. Soc. 114, 733 (1967).
K. Niihara and H. Toshio,J. Mater. Sci.,14, 1952 (1979).
P. Popper and S. N. Ruddlesden,Trans. Br. Ceram. Soc. 60, 903 (1951).
I. K. Uatu and M. Maccauley,Mater. Res. Bull. 9, 917 (1974).
K. Inomata and T. Yamane,J. Cryst. Growth,21, 317 (1974).
K. Inomata and Z. Inoue,J. Ceram. Assoc. Jpn. 81, 441 (1973).
K. Kijma, H. Tanaka, and N. Setaka,J. Cryst. Growth,24/25, 183 (1974).
A. G. Evans and J. V. Sharp,J. Mater. Sci.,6, 1292 (1971).
H. M. Jennings and M. H. Richman,J. Mater. Sci.,11, 2087 (1976).
A. J. Moulson,J. Mater. Sci.,14, 1017 (1979).
H. M. Jennings, S. C. Danforth, and M. H. Richman,J. Mater. Sci. 14, 1013 (1979).
H. M. Jennings,J. Mater. Sci.,19, 951 (1983).
A. Atkinson, P. J. Leatt, E. W. Poberts, and A. J. Moulson,J. Mater. Sci. 9, 981 (1974).
D. S. Thompson, and P. L. PrattScience of Ceramics Vol. 3 G. H. Stewart, ed., Academic Press, London (1967), p. 33.
R. Grun,J. Cryst. Growth 46, 143 (1979).
V. Grisbkov, V. Silaev, B. Schchetanov, E. Umantesu, and A. Isaiki,Sov. Phys. Crystallogr. 16, 852 (1972).
Iwao Yamai and Hajime Satio,J. Cryst. Growth 45, 511 (1978).
T. Okabe and M. Nakagawa,J. Cryst. Growth 46, 504 (1979).
P. D. Bayer and R. F. Cooper,J. Mater. Sci. 2, 237 (1967).
O. J. Gregory and M. H. Richman,Metallography 15, 157 (1982).
Y. Tarui, H. Teshima, K. Okura, and A. Minamiya,J. Electrochem. Soc. 110, 1167 (1963).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chang, Y., Kong, P. & Pfender, E. Characterization of silicon nitride particles synthesized in an atmospheric-pressure convection-stabilized arc. Plasma Chem Plasma Process 9, 73–93 (1989). https://doi.org/10.1007/BF01015827
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF01015827