Abstract
Thermodynamic considerations predict that RuO2 used in resistor pastes for AIN as conductive phase, can be reduced by AIN. In air RuO2 reacts with AIN only to a very small extent. In the presence of a “non-reducible” glass the reaction between RuO2 and AIN is demonstrated by thermoanalytical, mass spectroscopical and XRD methods. The described reaction could be a reason for bubbles in resistor layers on AIN. A crystallizing glass impedes the complete reaction.
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Kretzschmar, C., Otschik, P., Jaenicke-Rößler, K. et al. The reaction between ruthenium dioxide and aluminium nitride in resistor pastes. JOURNAL OF MATERIAL SCIENCE 28, 5713–5716 (1993). https://doi.org/10.1007/BF00365170
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DOI: https://doi.org/10.1007/BF00365170