Abstract
We have built and tested a novel type of scanning photoemission microscope. The instrument uses ultraviolet emission lines at photon energies of 16.8 eV (Ne I), 21.2 eV (He I) and 40.8 eV (He II). The radiation is focused into a spot of about 2 μm diameter on the specimen surface by means of an ellipsoidal mirror. The emitted photoelectrons are recorded in normal emission geometry by a standard electron energy analyzer. Two modes of operation are possible: spatially resolved electron energy distribution curves may be recorded from a fixed point on the sample. As the specimen is scanned piezo-mechanically in two dimensions across the beam, images within a fixed electron energy bandwith may be formed. We report on the realization and performance of the new microscope.
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Westhof, J., Meister, G., Lodders, F. et al. UV-photoelectron spectroscopy with lateral resolution. Appl. Phys. A 53, 410–413 (1991). https://doi.org/10.1007/BF00348153
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DOI: https://doi.org/10.1007/BF00348153