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The leakage current mechanism of PZT thin films deposited by in-situ sputtering

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Materials Engineering, Hanyang University, Seoul, Korea

    Y. S. Hwang & S. H. Paek

  2. Department of Electronic EnG., Honam University, Kwang-ju, Korea

    J. P. Mah

Authors
  1. Y. S. Hwang
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  2. S. H. Paek
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  3. J. P. Mah
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Hwang, Y.S., Paek, S.H. & Mah, J.P. The leakage current mechanism of PZT thin films deposited by in-situ sputtering. J Mater Sci Lett 15, 1030–1031 (1996). https://doi.org/10.1007/BF00274897

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  • DOI: https://doi.org/10.1007/BF00274897

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